Conformal graphene-based capacitive pressure sensor and preparation method thereof

A pressure sensor, graphene electrode technology, applied in the field of electronics, can solve problems such as low sensitivity and small pressure test range

Inactive Publication Date: 2017-02-01
CHONGQING INST OF GREEN & INTELLIGENT TECH CHINESE ACADEMY OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

At present, capacitive pressure sensors based on graphene transparent conductive films still have many technical barriers, such as low sensitivity and small pressure test range

Method used

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  • Conformal graphene-based capacitive pressure sensor and preparation method thereof
  • Conformal graphene-based capacitive pressure sensor and preparation method thereof
  • Conformal graphene-based capacitive pressure sensor and preparation method thereof

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Embodiment 1

[0033] This embodiment provides a capacitive pressure sensor based on conformal graphene, the sensor is a flat structure, specifically as attached figure 1 As shown, there are three main layers from top to bottom: graphene electrode layer, dielectric layer and graphene electrode layer; the upper and lower graphene electrode layers are both grating-shaped conformal graphene transparent conductive films, as shown in the attached Figure 4 As shown in (a), the upper grating-shaped conformal graphene transparent conductive film is assembled from conformal graphene 102 and polymer elastomer 101, and the lower grating-shaped conformal graphene transparent conductive film is composed of conformal graphene 104 and The polymer elastomer 105 is assembled; the material of the polymer elastomer 101 and 105 is flexible TPU; the conformal graphene 102 and 104 are single-layer graphene, the square resistance is ~900Ω / sq, and the light transmittance range is ~95 %; The material of the dielect...

Embodiment 2

[0045] This embodiment provides a capacitive pressure sensor based on conformal graphene, the sensor is a flat structure, specifically as attached Figure 5 As shown, there are three main layers from top to bottom: graphene electrode layer, dielectric layer and graphene electrode layer; the upper graphene electrode layer is a cone-shaped conformal graphene transparent conductive film, as shown in the attached Figure 4 As shown in (f), the cone-shaped conformal graphene transparent conductive film is directly assembled by polymer elastomer 301 supporting conformal graphene 302. The material of polymer elastomer 301 is flexible PDMS, conformal graphite Graphene 302 is three layers of graphene, square resistance ~ 100Ω / sq, light transmittance range is ~ 85%; the lower graphene electrode layer is made up of planar polymer elastomer 305 and planar graphene film 304, polymer elastomer 305 is PET, the planar graphene film 304 is single-layer graphene, the square resistance is ~200Ω / ...

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Abstract

The present invention discloses a conformal graphene-based capacitive pressure sensor and a preparation method thereof. The sensor is of a flat plate structure and comprises three main layers, namely, a graphene electrode layer, a dielectric layer and a graphene electrode layer which are sequentially distributed from top to bottom, wherein one or both of the upper graphene electrode layer and the low graphene electrode layer are conformal graphene transparent conductive films. The conformal graphene transparent conductive films are obtained by transferring conformal graphene on a metal surface with three-dimensional microstructures to the surface of a polymer elastomer through using a conformal transfer method. The conformal graphene can be both an electrode layer and a pressure sensing layer; and the three-dimensional microstructures on the surface of the conformal graphene are used to sense local deformation caused by touch pressure. With the microstructures adopted, the contacts of the capacitive pressure sensor can be increased, and the pressure sensitivity of the capacitive pressure sensor can be improved. A lot of pores exist between the three-dimensional microstructures, and therefore, the extrusion space of the elastomer can be increased, and a pressure test range can be extended. The conformal graphene-based capacitive pressure sensor has the advantages of simple structure, low cost, transparency, flexibility and easiness in processing.

Description

technical field [0001] The invention relates to an electronic device, in particular to a conformal graphene-based capacitive pressure sensor and a preparation method thereof, belonging to the technical field of electronics. Background technique [0002] The capacitive pressure sensor is a pressure sensor that uses a capacitive sensitive element to convert the measured pressure into a certain relationship with it. The pressure sensor has a simple structure, small input and large output, fast response, strong anti-interference ability, and environmental adaptability Good performance, low production cost, easy to be made transparent and flexible. Capacitive pressure sensors, mostly flat-plate structures, are composed of two electrodes and an intermediate insulating medium; through external pressure, the intermediate insulating medium is squeezed to change the distance between the two electrodes, thereby changing the capacitance value between the two electrodes , the capacitanc...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01L1/14G01L9/12
CPCG01L1/148G01L9/12
Inventor 魏大鹏宋雪芬于乐泳杨俊孙泰胡云史浩飞杜春雷
Owner CHONGQING INST OF GREEN & INTELLIGENT TECH CHINESE ACADEMY OF SCI
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