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Method for regulating grating period change rate based on stretching of PDMS grating

A technology of grating period and change rate, which is applied in the direction of diffraction grating, optics, optical elements, etc., can solve the problems of low controllability, complicated and time-consuming production process of variable-period grating, and achieve the effect of simple process flow

Inactive Publication Date: 2017-02-15
UNIV OF SHANGHAI FOR SCI & TECH
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Problems solved by technology

[0005] The present invention aims at the problems that the existing variable-period gratings are complex in manufacturing process, time-consuming, low in controllability, and high in manufacturing cost, and proposes a method for regulating the period change rate of the grating based on stretched PDMS gratings. The process is simple, High controllability, low production cost and short production cycle

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  • Method for regulating grating period change rate based on stretching of PDMS grating
  • Method for regulating grating period change rate based on stretching of PDMS grating
  • Method for regulating grating period change rate based on stretching of PDMS grating

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Embodiment Construction

[0022] The method of regulating the period change rate of the grating based on stretching the PDMS grating, the steps are as follows:

[0023] 1. Make a variable period grating based on PDMS:

[0024] 1) Make the master template grating by photolithography or mechanical engraving;

[0025] 2) Transfer the grating pattern on the master grating made in the previous step to the PDMS film. Specifically: a. Put the prepolymer and curing agent in a volume ratio of 20:1, put the mixed PDMS liquid in a vacuum drying oven, and keep vacuuming until there are no bubbles in the liquid; b. Pour the vacuum PDMS liquid on the surface of the grating template, heat and solidify at 100°C for 1 hour, and then cool; c. Peel off the PDMS film from the grating template, and cut out different blocks according to trapezoidal or rectangular shapes with different base angles The PDMS film is ready for use;

[0026] 2. Stretch the fabricated PDMS-based variable-period grating:

[0027] After step 1,...

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Abstract

The invention relates to a method for regulating a grating period change rate based on stretching of a PDMS grating, and a PDMS-based variable-period grating is manufactured. The method includes the steps of manufacturing a female template grating through photoetching or mechanical etching; transferring a grating pattern on the manufactured female template grating to a PDMS thin film; stretching the manufactured PDMS-based variable-period grating: flatly placing and clamping the manufactured PDMS thin film on a one-dimensional translational stretching table with one end of the thin film being fixed and the other end being clamped on a movable platform, and stretching the grating by a certain length along a direction vertical to a grating line in a PDMS elastic range; detecting the stretched period-variable grating: detecting the linear density of the stretched PDMS thin film, in a middle area of the thin film, distribution of the linear density of the grating changing linearly; and adjusting the base angle of the PDMS thin film in an isosceles trapezoid shape and stretching at a same load, thereby obtaining distribution of different linearly-changing grating linear density. The method for regulating the grating period change rate based on stretching of the PDMS grating is simple in technology, high in controllability, low in manufacturing cost, and short in period.

Description

technical field [0001] The invention relates to a variable-period grating manufacturing technology, in particular to a method for adjusting the period change rate of the grating based on stretching the PDMS grating. Background technique [0002] As a very important spectroscopic element, gratings are widely used in integrated optical circuits, optical communications, optical information processing, optical measurement and other fields. The grating pitch of the variable period grating changes according to certain rules, and has some special properties such as self-focusing, aberration correction, high resolution, and flat focal field. It is used in laser controlled nuclear fusion devices, synchrotron radiation applications, space probes, aerospace It has important and extensive applications in cutting-edge technologies such as aircraft. [0003] PDMS (Polydimethylsiloxane, polydimethylsiloxane, commonly referred to as organosilicon) is a high-molecular organosilicon compound...

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Application Information

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IPC IPC(8): G02B5/18
CPCG02B5/1847G02B5/1857
Inventor 盛斌罗露雯周红艳陈国华黄元申
Owner UNIV OF SHANGHAI FOR SCI & TECH
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