Crystal pulling furnace with replaceable furnace cavity

Abstract

The invention discloses a crystal pulling furnace with a replaceable furnace cavity. The crystal pulling furnace comprises the furnace cavity, a rotating pulling weighing unit, a heat-preservation heat field and a crucible. The heat-preservation heat field is arranged in the furnace cavity, the crucible is put into the heat-preservation heat field, the rotating pulling weighing unit is arranged on the furnace cavity, and a seed rod is arranged in the furnace cavity and connected with the a rotating pulling weighing unit; the furnace cavity comprises an upper flange disc, a lower flange disc and a cavity body, the cavity body is arranged between the upper flange disc and the lower flange disc, a heating device is arranged inside the cavity body or arranged on the periphery, and sealing devices are arranged between the cavity and the upper flange disc and the lower flange disc. A lifting device is arranged in the furnace cavity and fixed on the lower flange disc, and the heat-preservation heat field and the crucible are arranged on the lifting device. The crystal pulling furnace can be adjusted and replaced and can be suitable for growth of more size crystals, and is simple in structure, convenient to assemble and maintain and low in energy dissipation. In addition, the crucible can be located in the best temperature filed through lifting device, and the crystal growing efficiency and quality are improved.

Description

technical field [0001] The invention relates to a crystal pulling furnace whose chamber can be replaced according to the size of a crucible, and belongs to the technical field of crystal growth equipment. Background technique [0002] The pulling method is a method of growing high-quality single crystal from a melt. The basic principle is that the raw material is heated and melted in a crucible, and the seed crystal is slowly brought into contact with the melt. By precisely controlling the temperature and the crystal pulling speed and rotation speed, the solid The melt at the liquid interface continuously solidifies and grows crystals. Under this crystal growth method, the seed crystal process and crystal growth process can be observed and controlled in real time. By using high-quality directional seed crystal and necking technology, crystal defects can be reduced, high-quality crystals can be obtained, and the growth rate is fast. Therefore, the pulling method is a A cryst...

AI Technical Summary

Problems solved by technology

[0008] 1. At present, a heavy stainless steel double-layer water-cooled furnace shell structure is used, which consumes a large amount of stainless steel materials, and the cost is high. The stainless steel shell will also induce a large amount of heat to be taken away by the cooling water, resulting in energy waste.

[0009] 2. The size of the stainless steel furnace chamber is fixed. When using a pulling furnace with a large furnace chamber to grow small-sized crystals, it consumes a lot of energy and wastes energy.

When using a pulling furnace with a small chamber to grow large-scale crystals, the small chamber cannot be used

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