Surface acoustic wave transducer for detecting volatile organic pollutants

Abstract

The invention provides a surface acoustic wave transducer for detecting volatile organic pollutants. The central working frequency of the surface acoustic wave transducer is 200MHz, a lithium niobate material is adopted as a substrate, gold is adopted as an interpolation energy transducer material, and sol-gel silicon oxide is adopted as a sensitive membrane material; the effective area of a sensitive membrane is greater than 6mm<2>, and the sensitive membrane has a favorable adsorption effect on common volatile organic pollutants; after the sensitive membrane is saturated, alcohol is adopted for flushing so as to remove surface adsorption, and the sensitive membrane can be reused. The surface acoustic wave transducer for detecting volatile organic pollutants is high in measurement precision and convenient to use.

Description

technical field [0001] The invention belongs to the field of instrument science, in particular to a surface acoustic wave sensor for detecting volatile organic pollutants. Background technique [0002] In large-scale high-power laser devices, it is inevitable to use organic products such as rubber seals and lubricating oils, which generate volatile organic compounds (Volatile organic compounds, VOCs), which in turn pollute the optical components of the laser device. Due to the high laser flux, large-scale high-power laser devices have high cleanliness requirements for all components of the system, and the level of pollutant control is directly related to the laser operating flux of the entire device, which affects the final experimental results. [0003] At present, the method of monitoring VOCs is usually to manually collect samples, and then to the laboratory for analysis. This offline measurement method is expensive. When using existing technologies to detect and analyz...

AI Technical Summary

Problems solved by technology

At present, the conventional technology for detecting and analyzing trace VOCs is gas chromatography (GC). GC-based VOCs gas detection methods have high sensitivity and good selectivity, but these methods require expensive instruments, large volumes, complex analysis, and cumbersome operations. It takes a long time and it is difficult to meet the needs of rapid on-site monitoring and analysis of large laser devices

There are also infrared spectrophotometry (IRSP) and non-dispersive infrared analysis (NDIR) methods for VOCs monitoring, but the sensitivity of these two methods is not only limited by the length of the infrared beam propagation path, but also affected by interference factors such as people walking.

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