MEMS organic polymer surface acoustic wave hydrogen sensor

Abstract

The invention discloses an MEMS organic polymer surface acoustic wave hydrogen sensor. The MEMS organic polymer surface acoustic wave hydrogen sensor comprises a surface acoustic wave device and an intelligent control module, the surface acoustic wave device is connected with a frequency measuring device, the intelligent control module is connected with the frequency measuring device, a temperature sensor, a pressure sensor and a humidity sensor through a data acquiring and processing unit, and the intelligent control module is connected with a neural network error compensation unit, an RFID Internet-of-Things communication module and the frequency measuring device; and the surface acoustic wave device is a three-delayed surface acoustic wave device, the intersection of three surface acoustic wave delay lines is provided with a hydrogen sensitive film, and the hydrogen sensitive film is a polypyrrole organic polymer sensitive material with a long chain netted nanostructure containing a short chain. The MEMS organic polymer surface acoustic wave hydrogen sensor is sensitive to hydrogen at room temperature, improves the measuring precision of a characteristic quantity, realizes high-precision filtering and compensation of error interference of the temperature, the humidity and the pressure, and realizes the wireless transmission of sensing data, and greatly improves the informatization level of a surface acoustic wave hydrogen sensor.

Description

technical field [0001] The invention relates to the technical field in which organic polymers and sensor technologies cross each other, in particular to a MEMS organic polymer surface acoustic wave hydrogen sensor. Background technique [0002] The existing hydrogen sensors mainly include semiconductor combustion type, pyroelectric type and optical fiber type. Among them, the semiconductor combustion type hydrogen sensor has the disadvantages of high energy consumption, high sensitive temperature and potential safety hazards; the thermoelectric hydrogen sensor has the disadvantages of slow sensitivity, great environmental pollution, and high cost; the optical fiber type hydrogen sensor has the disadvantages of complicated preparation process , signal processing is difficult, and the disadvantages of high cost; it is urgent to study the hydrogen sensor with a new sensitive mechanism. With the development of organic polymer technology, doped organic polymer materials have exc...

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Problems solved by technology

[0003] In order to solve the problems of poor sensitivity, poor selectivity, easy aging and short lifespan of polypyrrole organic polymer gas obtained by ordinary polypyrrole doping methods and preparation processes, and to solve the problem of poor signal extraction quality of traditional surface acoustic wave sensors and the inability to ideally overcome temperature, To solve the technical problem of the influence of environmental interference such as humidity and pressure on the sensitivity accuracy, the present invention provides a MEMS organic polymer surface acoustic wave hydrogen sensor, which realizes the sensitivity to hydrogen at normal temperature, improves the measurement accuracy of sensitive characteristic quantities, and High-precision filtering and compensation of error interference such as temperature, humidity, pressure, etc., realize wireless transmission of sensing data, and can also build a sensing Internet of Things, which greatly improves the informatization level of surface acoustic wave hydrogen sensors

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