Horizontal-type probe device for deep-space environment atomic force microscope system based on quartz tuning fork probe

Abstract

The invention discloses a horizontal-type probe device for a deep-space environment atomic force microscope system based on a quartz tuning fork probe, and the horizontal-type probe device consists of the quartz tuning fork probe (1), a two-freedom-degree displacement platform (2), a sample platform (3), an approximation assembly (4), a guide rail (5), a three-dimensional scanner (6), a support, and a sliding block. The horizontal-type probe device employs the approximation assembly (4) to move a sample to a scope where the sample can generate an effective atomic force with a probe, employs the three-dimensional scanner (6) to control the quartz tuning fork probe (1) with the two balanced arms to scan the sample, achieves the dynamic control of an atomic force microscope through extracting a force sensing signal, and finally obtains the surface information of the sample. The horizontal-type structure design can enable an atomic force detection force to be perpendicular to the gravity direction of the quartz tuning fork probe (1), reduces the gravity center of the deep-space environment atomic force microscope system, can effectively prevent the gravity from affecting the measurement of an atomic force, greatly improves the stability and anti-shock performance of the deep-space environment atomic force microscope system, and meets the requirements for the measurement and imaging of the sample in a deep space environment.

Description

technical field [0001] The present invention relates to a probe instrument suitable for deep space environment atomic force microscope, more particularly, refers to a kind of deep space environment atomic force microscope horizontal probe device based on quartz tuning fork probe. Background technique [0002] In 1986, Binnig and Quate invented the Atomic Force Microscope (AFM). The atomic force microscope uses a very thin needle tip to detect the sample surface point by point. When the distance between the needle tip and the sample surface reaches the nanometer level, the probe will be subjected to the force generated by the sample, and the shape of the sample can be obtained by detecting this force. Appearance information. Since the birth of the atomic force microscope (AFM), it has been used as a major surface analysis instrument in many scientific fields such as physics, chemistry, metals, semiconductors, microelectronics, nanomaterials, biology, and life sciences. AFM ...

AI Technical Summary

Problems solved by technology

In the probe device of the vertical atomic force microscope system, the detection atomic force direction is on the same axis as the gravity direction of the quartz tuning fork probe, which cannot meet the requirements for sample measurement and imaging in deep space environments

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