Low temperature forming preparation method for getter

A getter, low-temperature technology, applied in the field of low-temperature molding and preparation of getters, can solve the problems of reducing the getter performance of the getter element, the influence of the activity of the getter powder, etc., to improve the dimensional accuracy and product consistency, reduce the Poisoning effect, activity-enhancing effect

Active Publication Date: 2017-04-19
GRIMAT ENG INST CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

The third is the powder injection molding process to prepare getter components, which includes mixing, granulation, injection molding, chemical degreasing, thermal degreasing, and vacuum

Method used

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  • Low temperature forming preparation method for getter

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Experimental program
Comparison scheme
Effect test

Embodiment 1

[0021] Such as figure 1 As shown, the Zr-V-Fe alloy (wherein the mass fraction of each component is Zr: 70%, V: 24.6%, Fe: 5.6%) and tert-butanol-based solvent (wherein the mass percentage of tert-butanol is 85%, The mass percentage of the binder is 15%) and is configured as an air-absorbing powder slurry, wherein the mass percentage of the Zr-V-Fe alloy powder is 81.5%. The slurry was poured into the mold, and then placed in a high and low temperature oven at -10°C for 20 minutes. After the green body of the getter element is formed, it is put into a vacuum box at a temperature of -10° C. for dealcoholization. The vacuum degree of the vacuum box is 100 Pa and kept for 10 hours. Put the dealcoholized getter element green body into the vacuum sintering furnace, and evacuate to 10 -3 Pa, heat up to 1000°C for sintering. Compared with the getter element with this composition ratio prepared by the traditional process, the suction rate and the suction volume are respectively inc...

Embodiment 2

[0023] Such as figure 1 As shown, Ti powder and Mo powder are mixed according to the mass ratio of 90:10 and tert-butanol-based solvent (wherein the mass percentage of tert-butanol is 90%, and the mass percentage of binder is 10%) to form an air-absorbing powder slurry, Wherein the mass percent of Ti and Mo mixed powder is 75%. The slurry is poured into the mold, and then placed in a high and low temperature oven at -20°C for 25 minutes. After the green body of the getter element is formed, it is put into a vacuum box at a temperature of -10°C for dealcoholization treatment, and the vacuum degree of the vacuum box is 10 Pa and kept for 12 hours. Put the dealcoholized getter element green body into the vacuum sintering furnace, and evacuate to 10 -4 Pa, heat up to 890°C for sintering. Compared with the getter element with this composition ratio prepared by the traditional process, the suction rate and the suction volume are respectively increased by 16% and 19%.

Embodiment 3

[0025] Such as figure 1 As shown, Zr powder, Nb powder, and Ce powder are mixed with tert-butanol-based solvent (88% by mass of tert-butanol and 12% by mass of binder) according to the mass ratio of 80:15:5 to configure the absorption Gas powder slurry, wherein the mass percentage of Zr, Nb, Ce mixed powder is 78%. The slurry was poured into the mold, and then placed in a high and low temperature oven at -30°C for 30 minutes. After the green body of the getter element is formed, it is put into a vacuum box at a temperature of -15° C. for dealcoholization. The vacuum degree of the vacuum box is 150 Pa and kept for 18 hours. Put the dealcoholized getter element green body into the vacuum sintering furnace, and evacuate to 5×10 -4 Pa, heat up to 930°C for sintering. Compared with the getter element prepared by the traditional process, the suction rate and the suction volume are respectively increased by 17.5% and 19.5%.

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Abstract

The invention belongs to the technical field of getter manufacturing, and particularly relates to a low temperature forming preparation method for a getter. Getter powder and a tert-butanol solvent are mixed to form inhalation powder slurry with certain flowability. The slurry is injected into a preform mold, and is rapidly frozen to realize low temperature forming. A formed blank undergoes vacuum low temperature de-alcohol treatment, and finally undergoes vacuum sintering to acquire an inhalation component. According to the preparation method provided by the invention, the preparation efficiency and the dimensional accuracy of the inhalation component are greatly improved; the prepared inhalation component is better than a product prepared by a traditional process; and the inhalation component has the advantages of large surface area, low activation temperature, high porosity, high inhalation rate, large inhalation capacity and the like.

Description

technical field [0001] The invention belongs to the technical field of getter element manufacturing, and in particular relates to a low-temperature molding preparation method of a getter. Background technique [0002] Getter is one of the effective solutions for long-term passive maintenance of vacuum environment inside electric vacuum devices. The getter can react or adsorb with active gas molecules through physical or chemical action, so as to effectively increase the vacuum degree in the device. [0003] At present, there are mainly three traditional preparation processes of getters. The first is to prepare the getter element by manual coating, that is, to coat the getter powder slurry layer by layer on the heating wire with an insulating layer. The shape of the getter element prepared by this process is irregular, and the product uniformity is relatively low. Poor, the preparation process of layer-by-layer coating results in a higher percentage of closed cells in the i...

Claims

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Application Information

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IPC IPC(8): H01J7/18
CPCH01J7/183
Inventor 崔航崔建东杨志民张艳苑鹏徐瑶华徐晓强
Owner GRIMAT ENG INST CO LTD
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