Carbon-based resistive flexible pressure sensor

A pressure sensor and resistive technology, which is applied in the field of new sensors, can solve the problems that cannot meet the needs of high-frequency pressure signal measurement, and achieve the effects of high sensitivity, good stability and wide measurement range

Inactive Publication Date: 2017-04-26
EAST CHINA NORMAL UNIVERSITY
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  • Carbon-based resistive flexible pressure sensor
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  • Carbon-based resistive flexible pressure sensor

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[0040] Example

[0041] Refer to figure 1 , The present invention has a film structure as a whole, including a four-layer structure film, a flexible polyimide film layer 1, a silver electrode layer 2, a flexible graphene and graphene oxide composite film layer 3, and a graphene oxide film insulating protective layer 4 . The manufacturing and assembly process of the present invention is as follows:

[0042] First, make the substrate of the pressure sensor: through mature ion exchange and inkjet printing technology, grow a layer of silver electrodes with a thickness of 2 μm on both ends of a clean polyimide film with a thickness of 50 μm.

[0043] Then make the upper functional layer of the pressure sensor: mix graphene and graphene oxide at a ratio of 5:1 and prepare a suspension with a concentration of 1.5mg / ml, and prepare a simple graphene oxide suspension at the same time Solution, the concentration is 1.5mg / ml. Then the two suspensions were continuously filtered by sequential ...

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Abstract

The invention discloses a carbon-based resistive flexible pressure sensor. The sensor of a four-layer film structure comprises a flexible polyimide thin film layer, a silver electrode layer, a flexible graphene and oxidized graphene composite thin film layer and an oxidized graphene film insulated protective layer. When the pressure sensor bears a pressure or bending strain occurs, the bearing condition of the pressure sensor can be obtained by measuring the resistance change of the two ends of a silver electrode. The whole carbon-based resistive flexible pressure sensor is of a film-shaped structure, the flexibility is high, and the pressure sensor can work normal in any bending angle; the sensitivity is high, and the strain coefficient ranges from 2.1 to 3; pressure measurement ranges widely from 10Pa to 900kPa; the resolution is very high, dynamic response is super-rapid, and dynamic high-frequency pressure signals reaching 10kHz can be measured; and the stability is high, and the pressure sensor passes more than 8000 repeated stability test. The pressure sensor is simple in preparation technology, low in equipment cost, suitable for wearable equipment, and can be used for measurement of physical quantities as pressure and strain.

Description

technical field [0001] The invention belongs to the technical field of novel sensors and relates to a carbon-based resistive flexible pressure sensor. Background technique [0002] A pressure sensor is an electronic device that converts physical quantities such as pressure and strain into electrical signals. Pressure is a very important physical quantity in nature. There are countless pressure sensors on the human body to sense pressure signals in the environment, so that we can adapt to the environment and avoid danger. With the rapid development of wearable devices, robots, electronic skin and other fields, in order to make these artificial machines have human-like intelligence, it is of great significance to perceive and accurately measure the physical quantity of pressure signals in the environment. [0003] However, traditional pressure sensors are generally made of non-flexible rigid materials, which are easily damaged and unable to work when subjected to large mechan...

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Application Information

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IPC IPC(8): G01L1/22
CPCG01L1/2287
Inventor 吴幸刘善彪张冬冬郭丛威谢馨莹吴婧王琪
Owner EAST CHINA NORMAL UNIVERSITY
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