Carbon-based resistive flexible pressure sensor
A pressure sensor and resistive technology, which is applied in the field of new sensors, can solve the problems that cannot meet the needs of high-frequency pressure signal measurement, and achieve the effects of high sensitivity, good stability and wide measurement range
Inactive Publication Date: 2017-04-26
EAST CHINA NORMAL UNIVERSITY
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The invention discloses a carbon-based resistive flexible pressure sensor. The sensor of a four-layer film structure comprises a flexible polyimide thin film layer, a silver electrode layer, a flexible graphene and oxidized graphene composite thin film layer and an oxidized graphene film insulated protective layer. When the pressure sensor bears a pressure or bending strain occurs, the bearing condition of the pressure sensor can be obtained by measuring the resistance change of the two ends of a silver electrode. The whole carbon-based resistive flexible pressure sensor is of a film-shaped structure, the flexibility is high, and the pressure sensor can work normal in any bending angle; the sensitivity is high, and the strain coefficient ranges from 2.1 to 3; pressure measurement ranges widely from 10Pa to 900kPa; the resolution is very high, dynamic response is super-rapid, and dynamic high-frequency pressure signals reaching 10kHz can be measured; and the stability is high, and the pressure sensor passes more than 8000 repeated stability test. The pressure sensor is simple in preparation technology, low in equipment cost, suitable for wearable equipment, and can be used for measurement of physical quantities as pressure and strain.
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Property | Measurement | Unit |
Thickness | 20.0 ~ 200.0 | µm |
Thickness | 500.0 | nm |
Thickness | 50.0 ~ 600.0 | µm |
tensile | MPa | |
Particle size | Pa | |
strength | 10 |
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