Organic material vapor deposition apparatus and method
An organic material and evaporation technology, which is applied in the direction of semiconductor devices, electrical components, circuits, etc., can solve the problems of unstable thermal evaporation speed, easy collapse, and thermal evaporation speed fluctuation of small molecule materials 200, so as to improve OLED devices. quality, improvement of film uniformity, and improvement of stability
Active Publication Date: 2019-01-22
TCL CHINA STAR OPTOELECTRONICS TECH CO LTD
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Problems solved by technology
However, when the small molecule material 200 is placed in a container such as the tungsten boat 120, the heat transfer rate itself is not fast, and the temperature of the small molecule material 200 near the central area rises slowly, resulting in instability in the thermal evaporation rate of the small molecule material 200. status
At the same time, for the sublimation-type small molecule material 200, as the heating proceeds, a gap will be formed between the small molecule material 200 and the wall of the tungsten boat 120 after sublimation for a certain period of time. After the gap is formed, the small molecule material 200 needs to be heated to a higher temperature. The temperature can reach the sublimation rate, and it is also prone to collapse, which makes the thermal evaporation rate fluctuate violently
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[0029] In order to further illustrate the technical means adopted by the present invention and its effects, the following describes in detail in conjunction with preferred embodiments of the present invention and accompanying drawings.
[0030] Please combine Figure 4 , the present invention firstly provides an organic material vapor deposition equipment, including a heating device 10, and an evaporating device 20 arranged on the heating device 10; the heating device 10 is used to generate heat energy; the evaporating device 20 is used to The heat energy generated by the heating device 10 evaporates the organic material 50;
[0031] The evaporation device 20 includes an evaporation vessel 21 and a heat conduction ball 22; the evaporation vessel 21 is used to carry an organic material 50, and the heat conduction ball 22 is used to disperse in the organic material 50 so that the organic material 50 is heated evenly. During the evaporation process, the heat conduction ball 22 c...
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Abstract
The invention provides an organic material vapor deposition device and method. In the organic material evaporation equipment of the present invention, the evaporation device includes an evaporation vessel and a heat conduction ball; the evaporation vessel is used to carry the organic material, and the heat conduction ball is used to disperse in the organic material so that the organic material is heated evenly. During the process, the heat conduction ball conducts heat evenly inside the organic material, so that it can balance the thermal evaporation rate of the organic material during the entire evaporation process, effectively improve the stability of the thermal evaporation rate of the organic material during the evaporation process, and then improve the thermal stability of the substrate on the substrate. The uniformity of film formation improves the quality of OLED devices.
Description
technical field [0001] The invention relates to the field of display technology, in particular to an organic material evaporation device and method. Background technique [0002] OLED (Organic Light-Emitting Diode, organic light-emitting diode) display, also known as organic electroluminescence display, is a new flat panel display device, because of its simple preparation process, low cost, low power consumption, high luminous brightness, Wide range of working temperature, light and thin size, fast response speed, easy to realize color display and large-screen display, easy to realize matching with integrated circuit driver, easy to realize flexible display, etc., so it has broad application prospects. [0003] In the preparation process of OLED devices, it is often necessary to use organic small molecules to prepare functional layers, such as electron transport layer (Electron Transport Layer, ETL), hole transport layer (Hole Transport Layer, HTL), hole blocking layer (Hole...
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IPC IPC(8): H01L51/56
CPCH10K71/16H10K71/00
Inventor 陈黎暄
Owner TCL CHINA STAR OPTOELECTRONICS TECH CO LTD