Negative photosensitive resin composition, resin cured film, partition wall and optical element
A technology of photosensitive resin and composition, which is applied in the direction of optics, electrical components, electric solid devices, etc., can solve the problems of difficult high sensitivity, insufficient liquid repellency, etc., and achieve the effect of reducing residue
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[0263] Hereinafter, although this invention is demonstrated based on an Example, this invention is not limited to these Examples. Examples 1-10 are examples, and Examples 11-13 are comparative examples.
[0264] Each measurement was performed by the following method.
[0265] [number average molecular weight (Mn), mass average molecular weight (Mw)]
[0266] The number average molecular weight (Mn) and the mass average molecular weight (Mw) were measured by gel permeation chromatography using polystyrene as a standard substance. As the gel permeation chromatography, HPLC-8220GPC (manufactured by Tosoh Corporation) was used. As a column, a column connected with three pieces of Shodex LF-604 was used. As a detector, an RI detector is used. As a standard substance, EasiCal PS1 (manufactured by Polymer Laboratories) was used. Furthermore, when measuring the number average molecular weight and mass average molecular weight, the column was kept at 37° C., tetrahydrofuran was us...
Synthetic example 1
[0335] (Synthesis example 1: Synthesis of ink repellent agent (E-1))
[0336] In inner volume 1,000cm equipped with mixer 3 420.0g of MEK, 99.0g of C6FMA, 9.0g of MAA, 18.0g of 2-HEMA, 45.0g of MMA, 9.0g of IBMA, 3.0g of polymerization initiator V-65 and 5.0g of DSH were put into the autoclave of It was polymerized at 50° C. for 24 hours while stirring, and then heated at 70° C. for 5 hours to deactivate the polymerization initiator to obtain a solution of a copolymer (ink repellent agent (E-1)) (solid content concentration; 30 mass %). This solution was used for manufacture of the negative photosensitive resin composition mentioned later. It should be noted that in the synthesis of the following ink repellent agent, for the case of obtaining the ink repellent agent in the state of a solution containing the ink repellent agent, after measuring or adjusting the solid content concentration, the state of the solution is used for negative photosensitive Manufacture of permanent...
Synthetic example 2
[0338] (Synthesis Example 2: Synthesis of Ink Repellent (E-2))
[0339] In inner volume 1,000cm equipped with mixer 3 415.1g of MEK, 1.0g of C6FMA, 18.0g of MAA, 81.0g of 2-HEMA, 5.0g of polymerization initiator V-65 and 4.7g of DSH were put into the autoclave of the After polymerization for 24 hours, it was heated at 70° C. for 5 hours to inactivate the polymerization initiator to obtain a copolymer solution. The number average molecular weight of the copolymer was 5540, and the mass average molecular weight was 13200.
[0340] Then, in the inner volume of 300cm equipped with mixer 3 130.0 g of the solution of the above-mentioned copolymer, 33.5 g of BEI, 0.13 g of DBTDL, and 1.5 g of TBQ were charged into an autoclave made of the above, and reacted at 40° C. for 24 hours while stirring to synthesize a crude polymer. After adding hexane to the obtained crude polymer solution and carrying out reprecipitation purification, it vacuum-dried and obtained the ink repellent agent...
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