A six-degree-of-freedom active and passive vibration reduction platform

Abstract

The invention provides a six-degree-of-freedom active / passive vibration reducing platform. The six-degree-of-freedom active / passive vibration reducing platform comprises a static platform, a movable platform, support legs, a hydraulic system and a control system; the movable platform and the static platform are supported through multiple support legs; six degrees of freedom of the movable platform are adjusted through the multiple support legs; hydraulic servo oil cylinders and valve control adjustable damping vibration reducers are integrated in the multiple support legs; the movable platform is provided with multiple acceleration sensors; displacement sensors are arranged in the support legs; the hydraulic system includes a power unit, a valve set unit, a third electromagnetic reversing valve and an electro-hydraulic servo reversing valve; the control system includes an industrial personal computer; and the industrial personalcomputer is connected with the acceleration sensors, the displacement sensors, the valve set unit, the third electromagnetic reversing valve and the electro-hydraulic servo reversing valve. The six-degree-of-freedom active / passive vibration reducing platform can precisely position devices or elements placed on the movable platform, can combine active vibration reduction with passive vibration reduction for use, is excellent in vibration reducing effect on low frequency and high frequency.

Description

technical field [0001] The invention relates to the technical field of platform vibration reduction or the field of experimental equipment, in particular to a six-degree-of-freedom active and passive vibration reduction platform. Background technique [0002] With the continuous development of science and technology, precision manufacturing equipment represented by precision machine tool processing and optical precision instruments and equipment has been more and more widely used. Because the working environment of this kind of equipment is generally more complicated, there are vibration sources that are difficult to predict, so the resulting vibration, especially the micro vibration, is difficult to solve with the usual method. Such equipment places great demands on high load-carrying capacity for vibration damping, wide frequency range and high precision. To make the control platform meet the vibration reduction requirements in a wide frequency range, vibration control me...

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Problems solved by technology

[0004] The patent publication number is CN101398052A, which discloses a heavy-duty precision shock absorber and its shock absorbing system. The patent uses an air spring as a passive shock absorber in the vertical direction, an inverted pendulum as a passive shock absorber in the horizontal direction, and a linear motor as a passive shock absorber in the vertical direction. Active actuators in the horizontal direction, so the active force is small, limiting the vibration damping and positioning functions in the horizontal direction

[0005] The patent publication number is CN105240445A, and the patent titled "six degrees of freedom semi-active vibration reduction platform" uses magneto-rheological dampers as the vibration reduction platform for the outriggers, but the vibration reduction platform is only suitable for small light-loaded equipment

[0006] The patent publication number is CN101383196A, and the patent titled "Modular Six Degrees of Freedom Active Vibration Isolation Platform" is mainly designed for the environment of low frequency, small amplitude and large load, and cannot solve the situation of high frequency vibration

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