Focusing lens and vibrating mirror type laser scanning system

Abstract

The invention discloses a focusing lens and a vibrating mirror type laser scanning system. The focusing lens comprises a flat concave lens and a convex lens, the flat concave lens comprises a plane and a concave surface arranged opposite to the plane, and the convex lens which is arranged fixedly comprises a first convex surface and a second convex surface arranged opposite to the plane; the flat concave lens can move in the axis, and light is input via the plane of the flat concave lens, passes the concave surface of the flat concave lens and the first convex surface of the convex lens successively, and is output via the second convex surface of the convex lens. The focusing lens is simple in structure and low in the adjusting error; the focusing lens has no real focus and thus, can be kept in a relatively low temperature; and when the waist radius of an input laser beam of the vibrating mirror type laser scanning system is greater than 7.5mm, the distance between a laser and the focusing lens does not influence the focusing effect.

Description

technical field [0001] The invention relates to the technical field of optical engineering, in particular to a focusing lens and a galvanometer laser scanning system. Background technique [0002] Laser scanning technology is a technology that can precisely control the pointing of laser beams. It has been widely used in optoelectronic medical treatment, laser processing, space laser communication, laser radar, remote sensing and measurement, adaptive optics and other fields. In the field of laser processing and laser compliance, galvanometer laser scanning technology has been used. In order to ensure the accuracy of laser processing, the laser needs to be focused before reaching the processing surface to ensure good focusing characteristics on the working surface. According to the position of the focusing system, it can be divided into two types of focusing: the front focus of the galvanometer and the focus after the galvanometer. Way. [0003] Patent CN101419336B in the p...

AI Technical Summary

Problems solved by technology

[0005] The galvanometer rear focusing method adopts the traditional F-theta lens focusing method. Due to the limitation of the lens size, the scanning range should not be too large, and the beam focusing characteristics at the edge of the scanning surface have become very poor.

[0006] The optical design and focusing model of the laser scanning system in the front focusing mode of the galvanometer are relatively complicated

Too many lenses will increase the errors caused by processing and assembly, which will affect the focusing effect

In addition, this type of 3D scanning system basically has a real focus point in the optical path in addition to the scanning surface. The focus point of the high-energy laser beam will cause excessive temperature and increase the risk of equipment damage

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