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Large-aperture aspheric online contour detection device and detection method thereof

A technology of contour detection and detection method, which is applied in the field of optical detection, can solve the problems of limiting the measurement accuracy of three-coordinate profilers, increasing displacement positioning errors, and greatly affecting detection accuracy, achieving long measurement time, improving measurement accuracy, and principle simple effect

Active Publication Date: 2017-06-13
CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The displacement positioning error of the three-coordinate measuring instrument increases with the increase of the range, which limits the improvement of the measurement accuracy of the three-coordinate profiler
The laser tracker has the advantages of large measuring range, easy to use, and is suitable for the contour detection of large-aperture aspheric mirrors, but its detection accuracy is greatly affected by factors such as encoders and test environments
The laser interferometer correction system adopted by the University of Arizona is expensive and the system structure is complex

Method used

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  • Large-aperture aspheric online contour detection device and detection method thereof
  • Large-aperture aspheric online contour detection device and detection method thereof
  • Large-aperture aspheric online contour detection device and detection method thereof

Examples

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Embodiment 1

[0036] Embodiment 1, large aperture aspheric surface online profile detection device, such as figure 1 As shown, it includes a laser tracker 1, a laser emitting mechanism, a CCD component 5, a central controller 6, a translation mechanism, and a target ball;

[0037] The CCD assembly includes a plurality of CCDs, and the plurality of CCDs are uniformly and symmetrically fixedly installed on the edge of the mirror under test; in this embodiment, the number of CCDs in the CCD assembly is 4 and can be evenly distributed around the mirror under test.

[0038] The multiple laser beams emitted by the laser emitting mechanism are respectively projected into each CCD in one-to-one correspondence; in this embodiment, such as figure 2 As shown, the laser output mechanism includes a laser 2, a beam splitter and a deflection mirror group 3; the laser light emitted by the laser 2 is divided into laser beams with the same number of CCDs in the CCD assembly through the beam splitter 3, and ...

Embodiment 2

[0043] Embodiment 2, a detection method of a large-diameter aspheric surface online profile detection device, using the large-diameter aspheric surface online profile detection device as in Example 1, the detection process specifically includes the following steps:

[0044] Step 1: select the mirror body benchmark on the mirror under test 10, adopt the laser tracker 1 to measure the mirror body benchmark of the mirror under test 10, and establish the measurement coordinate system of the mirror under test 10 according to the mirror body benchmark; in this embodiment , the mirror body reference is the side milling cylinder or facet of the mirror 9 .

[0045] Step 2: according to the measurement coordinate system, construct a sampling point set covering the entire mirror 10 under test;

[0046] Step 3: According to the set of sampling points, use the translation mechanism to move the target ball, stop when the target ball reaches the coordinates of a sampling point, trigger the las...

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Abstract

The invention discloses a large-aperture aspheric online contour detection device and a detection method thereof. High-precision contour detection of a large-aperture aspheric mirror can be realized. The device comprises a CCD (charge coupled device) component comprising a plurality of CCDs which are uniformly, symmetrically and fixedly mounted at the edge of the detected mirror, a laser emitting mechanism emits a plurality of laser beams projected to each CCD in a one-to-one corresponding manner, and the CCDs in the CCD component transmit acquired data to a central controller. A target ball is fixed onto a translation mechanism and horizontally moves along the surface of the detected mirror under driving of the translation mechanism. A laser tracker is used for acquiring the data of the position of the target ball and transmitting the acquired data to the central controller. The central controller receives the data acquired by the CCDs, corrects the data acquired by the laser tracker and calculates surface-shape errors. The distance between the laser tracker and a mirror body depends on the vertex curvature radius of the detected mirror, and the larger the curvature radius is, the longer the distance is.

Description

technical field [0001] The invention relates to the technical field of optical detection, in particular to a large-caliber aspheric online profile detection device and a detection method thereof. Background technique [0002] In the manufacturing process of aspheric mirrors, the contour detection method is the main means of surface shape detection in the grinding and rough polishing stages. The profilometry method measures the aspheric surface point by point through the precision displacement sensor, obtains the absolute height of the vector with a certain measurement datum, and obtains the surface shape error by comparing with the theoretical surface shape. According to whether the detection sensor is in contact with the detected aspheric surface, it can be divided into contact detection and non-contact detection. According to the movement mode of the detection sensor, it can be divided into three-coordinate detection and swing arm detection. [0003] The accuracy of conto...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01B11/24
CPCG01B11/24
Inventor 张学军陈新东薛栋林王孝坤程强
Owner CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI
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