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X-Ray Source, High-Voltage Generator, Electron Beam Gun, Rotary Target Assembly, Rotary Target, And Rotary Vacuum Seal

A technology of vacuum sealing and sealing parts, applied in the field of x-ray source, can solve the problem of not producing x-ray source and so on

Inactive Publication Date: 2017-06-23
NIKON METROLOGY
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, practically no suitably high-energy x-ray sources have been produced commercially

Method used

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  • X-Ray Source, High-Voltage Generator, Electron Beam Gun, Rotary Target Assembly, Rotary Target, And Rotary Vacuum Seal
  • X-Ray Source, High-Voltage Generator, Electron Beam Gun, Rotary Target Assembly, Rotary Target, And Rotary Vacuum Seal
  • X-Ray Source, High-Voltage Generator, Electron Beam Gun, Rotary Target Assembly, Rotary Target, And Rotary Vacuum Seal

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Embodiment Construction

[0109] Basic structure and general principles

[0110] X-rays can be produced by irradiating a target composed of a material containing a large proportion of high atomic number atoms or ions with a suitable high energy electron beam. An electron beam is produced by accelerating electrons across a large potential difference and then directing the beam to a target. Electrons in the electron beam interact with the electric field of the high atomic number nuclei and emit x-ray photons through the process of bremsstrahlung. Thus, the generated x-rays have a continuum with an upper energy limit determined by the energy of the incident photon.

[0111] However, in the exemplary electron beam case of 100 keV, typically only 1% of the incident electron beam energy is converted to x-ray radiation; the remainder of the incident electron beam energy is deposited as heat in the target. Although the proportion of the beam energy that is converted to x-ray radiation increases with increasi...

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PUM

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Abstract

Disclosed herein are a high-voltage generator for an x-ray source, an x-ray gun, an electron beam apparatus, a rotary vacuum seal, a target assembly for an x-ray source, a rotary x-ray emission target, and an x-ray source. These various aspects may separately and / or together enable the construction of an x-ray source which can operate at energies of up to 500 kV and beyond, which is suitable for use in commercial and research x-ray applications such as computerised tomography. In particular, the high-voltage generator includes a shield electrode electrically connected intermediate of a first voltage multiplier and a second voltage multiplier. The electron beam apparatus includes control photodetectors and photo emitters having a transparent conductive shield arranged therebetween. The rotary vacuum seal includes a pumpable chamber at a position intermediate between high-pressure and low-pressure ends of a bore for a rotating shaft. The rotary target assembly is configured such that when a torque between a bearing housing and a vacuum housing exceeds a predetermined torque, the bearing housing rotates relative to the vacuum housing. The rotary x-ray emission target has a plurality of target plates supported on a hub, the plates being arranged on the hub to provide an annular target region about an axis rotation of the hub. The x-ray gun is provided with a shield electrode maintained at a potential difference relative to the x-ray target different to the electron beam emission cathode.

Description

[0001] This application is a divisional application. The original application is a patent application submitted to the China Patent Office on November 10, 2015 (the international filing date is March 12, 2014). The application number is 201480026566.X, and the invention name is " x-ray source, high voltage generator, electron beam gun, rotating target assembly, rotating target, and rotating vacuum seal". technical field [0002] The present invention relates to an x-ray source, and more particularly to a high voltage generator, an electron beam gun, a rotating target assembly, a rotating target and a rotating vacuum seal therefor. Background technique [0003] X-ray imaging is an invaluable tool for research, industrial and medical applications. By illuminating a target object with x-ray radiation and by detecting the x-rays transmitted through the object, an image of the internal structure of the object can be obtained. [0004] The image allows identifying those parts of ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01J35/02H01J35/04H01J35/10H02M1/32H02M7/10H05G1/12
CPCH01J35/025H01J35/04H01J35/106H01J35/108H02M1/32H02M7/106H05G1/12F16C33/768F16C35/042F16J15/16H01J35/116H01J2235/1046H01J2235/20H01J2235/1204H01J2235/1262H01J2235/0236H01J2235/086H01J2235/083H01J35/1024H01J35/066H01J29/48H01J35/045H05G1/10H01J35/16H01J37/065H01J2237/2482
Inventor R·哈德兰德
Owner NIKON METROLOGY
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