Device and method for high numerical aperture oil immersion lens

Abstract

The invention provides a method for detecting wave aberration of a high numerical aperture oil immersion lens. An outgoing beam emitted by a light source converges on a light bar at the focal point of a collimating lens. After the beam is divided by a beam splitting prism, the beams are emitted along the collimating lens in parallel and projected onto a standard flat crystal. The incidence plane of the standard flat crystal is taken as the reference plane, a part of the light is reflected along the reference plane, and the other part of the light is transmitted through the reference plane and is focused on the focal point through a measured lens and medium oil. The light beam enters a super-hemispherical reflector in the point incidence direction of the focal point and returned, finally, the two light beams are reflected through the beam splitting prism, two bright holes are formed in the exit pupil position, by adjusting an air wedge between the standard flat crystal and the measured lens, images of the two small holes are overlapped, and finally through the CCD, the images at the small holes are converted into electrical signals. The super-hemispherical reflector is made of glass, the vector height of the super-hemispherical reflector is larger than the radius R of the super-hemispherical reflector, and the super-hemispherical excircle surface is plated with a total reflection film.

Description

technical field [0001] The technology relates to a detection device and method of a wave aberration detector, especially a device and a method for wave aberration detection of a large numerical aperture oil immersion lens. Background technique [0002] At present, when the known wave aberration detector is used to measure the objective lens of the biological microscope, since there is a cover glass with a certain thickness on the observation surface of the biological microscope, when measuring the wave aberration, the cover glass and the fixing method will not affect the measurement. The error of the result has a great influence. Usually, when measuring a lens with a small numerical aperture, the cover glass can be placed directly on the front of the objective lens, but for a lens with a large numerical aperture, especially when measuring an oil immersion objective lens with a numerical aperture greater than 1 , since the reference reflection sphere used for autocollimation ...

AI Technical Summary

Problems solved by technology

[0005] In order to overcome the problem that the existing testing device and method cannot measure the oil-immersion objective lens with numerical aperture greater than 1, and the cover glass for testing is difficult to fix, this technology provides a wave image that can measure the oil-immersion lens with numerical aperture greater than 1. Wave aberration detection method for large numerical aperture oil immersion lens based on aberration detection

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