High-frequency induction plasma water-cooled quartz lamps
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- 陕西安康三航纳米科技股份有限公司
- Publication Date
- 2019-03-08
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Abstract
Description
Technical field:
[0001] The invention relates to the field of nano-material manufacturing, in particular to a high-frequency induction plasma water-cooled quartz lamp used in high-frequency plasma multifunctional powder production equipment for manufacturing metal nano powder. Background technique:
[0002] High-frequency plasma is also called high-frequency induction plasma. Its principle is to use the high-frequency electromagnetic field provided by the high-frequency induction coil to make gas molecules collide violently and ionize at high temperature, and then realize energy conversion to generate plasma. It has the advantages of energy concentration, high temperature (about 10000K), and no electrode pollution.
[0003] High-frequency plasma multifunctional powder production equipment utilizes the high temperature and etching effect of high-frequency induction plasma to realize the preparation of simple nano-powder and the gas phase synthesis of oxide, nitride and carbid...