High-frequency induction plasma water-cooled quartz lamps

Abstract

The invention relates to a high-frequency induction plasma water-cooled quartz lamp. The lamp is formed by assembly of an upper support, a powder feeding gun seat, a taper sleeve, a powder feeding gun, a locking threaded sleeve, an inner tube sleeve, an inner tube pressing sleeve, an intermediate support, a manifold, an intermediate tube upper pressing sleeve, a supporting plate, a lower support, supporting columns, an outer tube upper pressing sleeve, an outer tube lower pressing sleeve, a base, a supporting column protection sheath, a water cooled jacket, a transition plate, an intermediate tube lower pressing sleeve, an axis, an intermediate tube, a water inlet, an outer tube, induction coils, an inner tube, a water outlet, a pressure plate, a cooling gas inlet, an ionic gas inlet, an igniter 31 and a plurality of sealing rings. The high-frequency induction plasma water-cooled quartz lamp disclosed by the invention is used for high-frequency plasma multi-functional powder production equipment for manufacturing metal nano-powder, and has the advantages of being convenient to repair and maintain, good in cooling and heat dissipation effects, convenient to ignite, high in energy utilization rate, and the like.

Description

Technical field: [0001] The invention relates to the field of nano-material manufacturing, in particular to a high-frequency induction plasma water-cooled quartz lamp used in high-frequency plasma multifunctional powder production equipment for manufacturing metal nano powder. Background technique: [0002] High-frequency plasma is also called high-frequency induction plasma. Its principle is to use the high-frequency electromagnetic field provided by the high-frequency induction coil to make gas molecules collide violently and ionize at high temperature, and then realize energy conversion to generate plasma. It has the advantages of energy concentration, high temperature (about 10000K), and no electrode pollution. [0003] High-frequency plasma multifunctional powder production equipment utilizes the high temperature and etching effect of high-frequency induction plasma to realize the preparation of simple nano-powder and the gas phase synthesis of oxide, nitride and carbid...

AI Technical Summary

Problems solved by technology

The maximum temperature of the plasma is nearly 10,000 degrees, so if the cooling is not sufficient, the lamps made of quartz glass tubes are easy to burn out and fail due to high temperature.

[0007] During the use of high-frequency plasma multifunctional powder production equipment (CN201110179097.3), the inventor of the patent found that the original lamps had many shortcomings, such as: the lamps are arranged in a closed tank and it is inconvenient to repair and maintain, and the cooling of the lamps adopts gas cooling 1. The heat dissipation effect is not good, so the lamps are often burned, the closed tank absorbs the electromagnetic field energy, which affects the effective power output of the equipment, and the ignition is inconvenient. Therefore, the original lamps have been greatly improved on the basis of summarizing practical experience.

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