Radio frequency ion source neutralizer achieving stable ionization effect

Abstract

The invention relates to a radio frequency ion source neutralizer achieving stable ionization effect. The neutralizer comprises a radio frequency power supply, a radio frequency inductance matching network, a built-luminance sustaining pole, an outer shell, a radio frequency coil, an insulated ionization chamber body and a positive ion collector. The radio frequency power supply is connected with the radio frequency coil through the radio frequency inductance matching network; the radio frequency coil is arranged spirally on the outer side wall of the insulated ionization chamber body; the outer shell is sleeved on the outer side of the radio frequency coil. The insulated ionization chamber body covers and is arranged on the positive ion collector and encloses with the positive ion collector to form an insulated ionization chamber. The insulated ionization chamber body is provided with an emission hole. The built-luminance sustaining pole is provided with a first through hole corresponding to the emission hole. The position ion collector is provided with a gas inlet channel for inert gases to flow in and a gas supply hole for inert gases that communicates the gas inlet channel and the insulated ionization chamber. The radio frequency coil of the invention does not become deformed as time goes so that the stability of the ionization effect of the neutralizer can be guaranteed. In addition, since the oxidation effect of the radio frequency coil is suppressed, the service lifetime of the radio frequency coil is prolonged and the ionization effect is guaranteed.

Description

technical field [0001] The invention relates to the technical field of radio frequency ion source neutralizers, and more particularly, to a radio frequency ion source neutralizer with stable ionization effect. Background technique [0002] The ion source is a device that ionizes neutral atoms or molecules and draws an ion beam from it. It is various types of ion accelerators, mass spectrometers, electromagnetic isotope separators, ion implanters, ion beam etching devices, and ion thrusters. It is also an indispensable part of equipment such as neutral beam injectors in controlled fusion devices. The ion source neutralizer is an ion emitting part that emits electrons to the ion beam drawn out by the ion source to neutralize the beam current and beam charge. [0003] The traditional neutralizer generates free electrons by heating the filament. Due to the short life of the filament, the continuous working time is generally less than 10 hours. However, the ion source neutralize...

AI Technical Summary

Problems solved by technology

However, the temperature of the radio frequency coil of the existing radio frequency ion source neutralizer can reach hundreds of degrees after working for a long time, and the change of temperature will cause the radio frequency coil to deform, which will cause the ionization effect of the neutralizer to be unstable; in addition, the existing radio frequency The coil is exposed in the air, and the oxidation effect is serious, which affects the service life and also affects the ionization effect

Images