Method for manufacturing photodiode, photodiode and optical inductor

Abstract

The invention relates to a method for manufacturing a photodiode. The method includes the following steps: providing a semiconductor substrate and forming a photodiode PN junction in the semiconductor substrate, the photodiode PN junction and an active device in an analog circuit being formed synchronously; depositing to form a multi-layer structure on the semiconductor substrate; forming a window in the multi-layer structure, the window being arranged on the PN junction of the photodiode; and depositing silicon nitride and / or silicon dioxide on the window area surface to form a reflecting layer. In addition, also provided are a photodiode and an optical inductor. Under the circumstance that original device performance is kept unchanged in an existing semiconductor technology, the photodiode PN junction and the active device in the analog circuit are synchronously formed, the corrosion technology of the photodiode window is changed at the same time, the window area is additionally provided with the reflecting layer, and single-chip integration of the photodiode and the active device in the analog circuit on an arbitrary technology platform is realized. The technological process of integration of the photodiode and the analog circuit in the same chip is simple and is low in cost.

Description

technical field [0001] The invention relates to semiconductor technology, in particular to a method for making a photodiode, a photodiode and a light sensor. Background technique [0002] Light Emitting Diode (English for Light Emitting Diode, LED for short) is a kind of semiconductor diode, which can convert electrical energy into light energy, and emit visible light of various colors such as yellow, green, and blue, as well as infrared and ultraviolet invisible light. Compared with small incandescent bulbs and neon lamps, it has the advantages of low operating voltage and current, high reliability, long life and convenient adjustment of luminous brightness. [0003] Nowadays, with the development of semiconductor process technology, the integration of photodiodes and components in analog circuits has become one of the focuses of people's attention. The components in the analog circuit can be bipolar junction transistors (Bipolar Junction Transistor, BJT), metal oxide semi...

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Problems solved by technology

[0004] Based on this, it is necessary to provide a photodiode integrated in the analog circuit for the problem that the photodiode and the analog circuit cannot be integrated on the same chip and the cost is high while keeping the performance of the components in the original process unchanged. Method of Diodes, Photodiodes and Light Sensors

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