Plasma resonant power supply system based on adaptive power control

Abstract

The invention discloses a plasma resonant power supply system based on adaptive power control. The system comprises mainly comprises a full bridge inverter circuit, a series and parallel resonant circuit, a filtering circuit, a transformer, a plasma load, a current sampling module, a voltage sampling module, a control system and a driving circuit. The invention provides an adaptive power control system, the control modes include a MODE1 mode and a MODE0 mode, and the two control modes can be switched freely according to a load state. In the MODE1 mode, a pulse signal frequency is constant, and a purpose of adjusting power is achieved through adjusting a pulse width. In the MODE0 mode, the pulse signal pulse width is constant, and a purpose of adjusting the power is achieved through adjusting the pulse frequency. In addition, according to the series and parallel resonant circuit provided by the invention, a direct current component can be effectively prevented from entering into the transformer and the output voltage of the inverter is converted into resonant series current and parallel voltage, thus the switching loss of a power tube is reduced, and the efficiency of the system is improved.

Description

technical field [0001] The invention relates to a power supply system for special applications, in particular to a plasma resonance power supply system based on adaptive power control. Background technique [0002] Plasma is an ionized gas-like substance composed of atoms deprived of some electrons and positive and negative electrons generated after the atoms are ionized. According to the principle of generation and the different properties of plasma, it can be divided into different types and used in different fields. Among them, atmospheric pressure normal temperature plasma is widely used in sterilization, surface treatment, purification and energy-saving air cold light source, etc., and is receiving more and more attention. focus on. The plasma load voltage and power can become highly different in different application fields and situations, and the usual way to solve this problem is to develop a special AC or DC output power system. However, it should be pointed out t...

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Problems solved by technology

[0005] The object of the present invention is to provide a plasma resonance power supply system based on adaptive power control, which solves the following three problems: (1) under the condition of high-frequency output, the conduction loss and switching loss of power devices are large, and the electromagnetic The interference problem is serious, (2) The traditional resonant converter adopts a single frequency modulation control method to adjust the output, the noise spectrum is wide, the filter circuit design is more complicated, the control principle is difficult, and the utilization rate of the magnetic components is poor, (3) The change of the input condition or the load changes, may cause the power device to lose the soft-switching condition

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