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Switch device and electronic apparatus

一种开关装置、固定电极的技术，应用在电开关、微观结构装置、微电子微观结构装置等方向，能够解决切换开关性能降低、切换时间延长、驱动电压增大等问题，达到减小操作电压、迅速切换操作的效果

Inactive Publication Date: 2017-08-18
SONY CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] However, the adhesion of the contact point is determined by the shape of the contact point, the material of the contact point, and the surface state, so it is difficult to control the adhesion force at will
Also, since the spring constant and the driving voltage of the switch have a trade-off relationship, when the reset time is shortened by hardening the spring, the driving voltage increases
When the reset time is long, the switching time is prolonged and the performance of the toggle switch is reduced

Method used

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  • Switch device and electronic apparatus
  • Switch device and electronic apparatus
  • Switch device and electronic apparatus

Examples

Experimental program
Comparison scheme
Effect test

no. 1 approach

[0057] figure 1 is a schematic plan view showing the configuration of the switchgear according to the first embodiment. figure 2 is along figure 1 The cross-sectional view taken along the line [A]-[A] in. In each drawing, the X-axis and Y-axis represent plane directions orthogonal to each other, and the Z-axis represents a height (thickness) direction orthogonal to the X-axis and Y-axis. The same applies to the subsequent figures.

[0058] [Overall structure of the switchgear]

[0059] The switch device 1 according to the present embodiment is configured as a bulk silicon MEMS type electrostatically driven push / pull switch. The switching device 1 is generally produced by performing fine processing on the surface of an SOI (Silicon On Insulator) substrate. The SOI substrate includes a laminate of layers: a support layer composed of silicon, formed on the support layer and made of silicon oxide (SiO 2 ) composed of a BOX (Buried Oxide) layer, and an active layer (active l...

no. 2 approach

[0123] Figure 6 is a schematic plan view showing the configuration of a switchgear according to a second embodiment of the present technology. Hereinafter, configurations different from those according to the first embodiment will be mainly described, configurations that are the same as those according to the above-described embodiment will be denoted by the same reference numerals, and descriptions thereof will be omitted or simplified.

[0124] The switch device 2 according to the present embodiment is different from the switch device in the first embodiment in that movable contact points 331 and 332 are respectively provided at both ends of the connecting rod 34 of the movable electrode 30, and at the first movable An elastic support portion 50 is provided between the movable electrode piece 31 and the second movable electrode piece 32 . Since other configurations of the movable electrode 30 and configurations of the first and second fixed electrodes 21 and 22 are the sam...

no. 3 approach

[0127] Figure 7 is a schematic plan view showing the configuration of a switchgear according to a third embodiment of the present technology. Hereinafter, configurations different from those according to the first embodiment will be mainly described, configurations that are the same as those according to the above-described embodiment will be denoted by the same reference numerals, and descriptions thereof will be omitted or simplified.

[0128] The switch device 3 according to the present embodiment includes a first switch mechanism 71 and a second switch mechanism 72 . The first switch mechanism 71 and the second switch mechanism 72 are arranged to face each other in the Y-axis direction. The first switch mechanism 71 and the second switch mechanism 72 each include the same configuration as the switch device 1 described in the first embodiment.

[0129] Note that the switch mechanisms 71 and 72 are not limited thereto, and each of the switch mechanisms 71 and 72 may be co...

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PUM

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Abstract

To make it possible to quickly perform switching operations of a switch. According to one embodiment of the present technology of a switch device, a movable electrode has a first movable electrode piece, a second movable electrode piece, and a movable contact point. A first fixed electrode has first and second fixed electrode pieces that face each other with the first movable electrode piece therebetween, and the first fixed electrode piece faces the first movable electrode piece with a gap therebetween, said gap being smaller than that between the second fixed electrode piece and the first movable electrode piece. The second fixed electrode has third and fourth fixed electrode pieces that face each other with the second movable electrode piece therebetween, and the third fixed electrode piece faces the second movable electrode piece with a gap therebetween, said gap being smaller than that between the fourth fixed electrode piece and the second movable electrode piece. A first fixed contact point is in contact with a movable contact point that moves in the first direction due to electrostatic attraction between the movable electrode and the first fixed electrode. A second fixed contact point is in contact with a movable contact point that moves in the second direction opposite to the first direction due to electrostatic attraction between the movable electrode and the second fixed electrode.

Description

technical field [0001] The present technology relates to an electrostatically driven switch device and electronic equipment including the electrostatically driven switch device. Background technique [0002] MEMS (Micro-Electro-Mechanical Systems) switch is a mechanical switch that switches ON / OFF through physical contact. The main features of MEMS switches are higher insulation characteristics, linearity and high resistance than semiconductor switches. oppressive. [0003] An electrostatically driven MEMS switch provides a potential difference between a movable electrode and a fixed electrode, drives an actuator by electrostatic attraction, and makes the switch in a conducting state by bringing contact points into contact with each other. In the case of turning off the switch, the potential difference between the electrodes is usually made zero, and the restoring force of the return spring returns the electrodes to their respective initial positions, thereby separating the...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01H59/00
CPCH01H59/0009H01H2001/0042H01H2001/0063H01H2001/0078B81B2201/033B81B2203/0136B81B2203/051H01H1/0036
Inventor 盛田伸也
Owner SONY CORP
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