Fully differential force balance mode MEMS acceleration sensor signal processing circuit

A technology of acceleration sensor and signal processing circuit, applied in the direction of measurement of acceleration, speed/acceleration/impact measurement, instruments, etc., can solve the problem of closed-loop system instability and achieve the effect of high sensitivity

Inactive Publication Date: 2017-08-22
XIANGTAN UNIV
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, unlike the open-loop system, the closed-loop system has hidden dangers

Method used

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  • Fully differential force balance mode MEMS acceleration sensor signal processing circuit
  • Fully differential force balance mode MEMS acceleration sensor signal processing circuit
  • Fully differential force balance mode MEMS acceleration sensor signal processing circuit

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Embodiment Construction

[0028] The present invention will be further described below in conjunction with the accompanying drawings and embodiments.

[0029] Such as figure 1 As shown, the full differential force balance mode MEMS acceleration sensor signal processing circuit of the present invention includes an equivalent capacitor 1 of the MEMS acceleration sensor, a capacitance compensation array 2, an off-chip capacitor 3, a full differential switched capacitor circuit 4, a reference source circuit 5, and multiple Phase clock circuit 6, sample and hold circuit 7, instrumentation amplifier 10.

[0030] The output signal of the multi-phase clock circuit 6 controls the switch in the front-end fully differential switched capacitor circuit 4; the upper and lower plates of the capacitive accelerometer are connected to the switch controlled by the multi-phase clock circuit 6, and the middle plate is amplified by the front-end amplifying circuit In mode, it is connected with the front-end fully different...

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PUM

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Abstract

The invention discloses a fully differential force balance mode MEMS acceleration sensor signal processing circuit comprising a fully differential switched capacitor circuit, a sampling and holding circuit, an instrument amplifier, a multiphase clock circuit and a reference source circuit. The fully differential switched capacitor circuit detects the MEMS change capacitance and outputs differential signals to be connected with the instrument amplifier through the sampling and holding circuit, and the differential signals are converted into single-end output signals through the instrument amplifier. According to the acceleration sensor signal processing circuit, high-precision and low-noise voltage output can be realized; and the designed acceleration sensor signal processing circuit works in a force balance second-order simulation closed-loop system and can convert the output voltage of the front-end detection circuit into electrostatic force to be fed back to the intermediate pole plate so that the mass block is maintained to vibrate near the balance position, and thus the circuit has high sensitivity.

Description

technical field [0001] The invention belongs to the field of MEMS sensor design, and in particular relates to a signal processing circuit of a full differential force balance mode MEMS acceleration sensor. . Background technique [0002] For MEMS capacitive acceleration sensors, since the equivalent capacitance is usually on the order of 10E-12F or even smaller, and the variation of the sensitive capacitance is on the order of 10E-15-10E-18F, the signals to be processed by the ASIC interface circuit are very Weak, so the weak signal detection circuit with low noise and strong anti-interference ability is one of the key technologies of MEMS capacitive acceleration sensors. [0003] In terms of the number of detection terminals, the front-end detection circuit is divided into two types: single-end detection and differential detection. The power supply rejection ratio can have a first-order offset effect on common-mode errors such as substrate noise and switch charge injectio...

Claims

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Application Information

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IPC IPC(8): G01P15/125
CPCG01P15/125
Inventor 金湘亮杨柳
Owner XIANGTAN UNIV
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