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Solar cell coating equipment and solar cell chain production equipment

A technology of solar cells and coating equipment, which is applied in the manufacture of circuits, electrical components, and final products. It can solve the problems of low production efficiency, high pollution level and high breakage rate of crystal silicon wafers, and improve production efficiency, reduce pollution level and breakage. rate, and the effect of reducing the degree of pollution

Active Publication Date: 2019-09-13
CHANGZHOU BITAI TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] The object of the present invention is to provide a solar cell coating equipment to solve the problem of high pollution degree and broken rate of crystalline silicon wafers and high production efficiency due to the need for multiple loading and unloading of crystalline silicon wafers in the existing coating process. low technical issues
[0004] The purpose of the present invention is also to provide a solar cell chain production equipment, to solve the existing solar cell production equipment due to the need for multiple loading and unloading of crystal silicon wafers caused by the degree of pollution and High crushing rate and low production efficiency technical problems

Method used

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  • Solar cell coating equipment and solar cell chain production equipment
  • Solar cell coating equipment and solar cell chain production equipment
  • Solar cell coating equipment and solar cell chain production equipment

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0033] figure 1 A schematic structural diagram of a solar cell coating device provided in Embodiment 1 of the present invention; figure 2 A front view of the internal structure of the preheating chamber provided in Embodiment 1 of the present invention; image 3 A top view of the internal structure of the preheating chamber provided for Embodiment 1 of the present invention; Figure 4 A front view of the internal structure of the oxidation chamber provided in Embodiment 1 of the present invention; Figure 5 It is a front view of the internal structure of the coating chamber provided by Embodiment 1 of the present invention. figure 1 The middle arrow direction A represents the conveying direction of the carrier plate 104 , and the arrow direction B represents the flow direction of the oxygen plasma. see Figure 1 to Figure 5As shown, this embodiment provides a solar cell coating equipment, including a transfer device, a preheating chamber 101, an oxidation chamber 102 and ...

Embodiment 2

[0051] Image 6 It is a front view of the internal structure of the first closed chamber provided by Embodiment 2 of the present invention. see Image 6 As shown, this embodiment also provides a solar cell coating device. The solar cell coating device in this embodiment describes another implementation of the first isolation mechanism and the second isolation mechanism. In addition, the first embodiment The technical solution also belongs to this embodiment, and will not be described again here. The same components use the same reference numerals as in the first embodiment, and reference is made to the description of the first embodiment.

[0052] The first isolation mechanism provided in this embodiment is a first partition 116, and the second isolation mechanism is a second partition; the inside of the first closed chamber 118 is provided with a first telescopic device 117, and the first telescopic device 117 is used to make the The first partition 116 is opened or closed...

Embodiment 3

[0055] Figure 7 The process flow chart of the solar cell chain production equipment provided by Embodiment 3 of the present invention. Figure 7 Among them, P means vacuuming. see Figure 7 As shown, this embodiment provides a solar battery chain production equipment, including the solar battery coating equipment provided in the first embodiment.

[0056] In this embodiment, the solar cell chain production equipment includes an automatic feeding table 126 arranged in sequence along the conveying direction of the carrier plate 104, the solar cell coating equipment provided in Embodiment 1, a cooling chamber 127, a gas release chamber 128 and an automatic The unloading table 129, wherein, the transfer device can transfer the carrier plate 104 from the automatic unloading table 129 back to the automatic loading table 126, and carry out the loading and coating process of the next batch of silicon wafers 105, so that the continuous reciprocation of solar cells is realized. chem...

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Abstract

The invention relates to the technical field of production of solar cells, and specifically relates to a solar cell coating device and a solar cell chain type production device. The solar cell coating device comprises a conveying device, a pre-heating chamber, an oxidation chamber, and a coating chamber, the conveying device is used for conveying a support plate to the pre-heating chamber, the oxidation chamber and the coating chamber in sequence, a first closed chamber is arranged between an outlet of the pre-heating chamber and an inlet of the oxidation chamber, the internal part of the first closed chamber is provided with a first isolating mechanism, the first isolating mechanism is used for enabling the pre-heating chamber and the oxidation chamber to communicate or to be disconnected, a second closed chamber is arranged between an outlet of the oxidation chamber and an inlet of the coating chamber, the internal part of the second closed chamber is provided with a second isolating mechanism, and the second isolating mechanism is used for enabling the oxidation chamber and the coating chamber to communicate or to be disconnected. According to the solar cell coating device and the solar cell chain type production device, coating of silicon chips can be continuously performed in one apparatus, repeated feeding and blanking of the silicon chips are avoided, and the pollution degree and the breaking rate of the silicon chips are reduced.

Description

technical field [0001] The invention relates to the technical field of solar cell production, in particular to solar cell coating equipment and solar cell chain production equipment. Background technique [0002] In the production process of solar cells, the formation of silicon oxide passivation layer and amorphous silicon coating layer plays a vital role in improving the conversion efficiency of cells. At present, the traditional production process is carried out in two steps. First, oxygen is introduced into the tube furnace at 700-900°C to slowly grow a silicon oxide passivation layer on the surface of the crystalline silicon wafer, and then the crystalline silicon wafer is removed from the tubular furnace. The furnace is transferred to another chemical vapor deposition chamber to deposit amorphous silicon coating layer. In the process of transferring crystalline silicon wafers between two devices, it is necessary to load and unload the crystalline silicon wafers multip...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L31/18C23C16/02C23C16/24C23C16/34C23C16/44
CPCC23C16/0218C23C16/24C23C16/345C23C16/4401H01L31/18Y02P70/50
Inventor 上官泉元庄正军朱广东侯岳明杨玉杰
Owner CHANGZHOU BITAI TECH