Infrared transmissive film, optical film, antireflection film, optical component, optical system, and imaging device

An infrared transmission and optical system technology, which is applied in the fields of infrared transmission film, optical film, anti-reflection film, optical components, optical system and camera device, can solve the problems of film making, difficult operation and unmanufacturability, and achieve high water resistance Good performance and easy film formation

Active Publication Date: 2020-04-10
TAMRON
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, as mentioned above, ZnS, ZnSe, and PbTe are difficult to form films by magnetron sputtering, and these materials are toxic, so their handling is difficult
On the other hand, Y 2 o 3 , CeO 2 , HfO 2 However, it is translucent to light in the far-infrared region (8 μm to 14 μm), and it is impossible to produce a film transparent to far-infrared rays.

Method used

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  • Infrared transmissive film, optical film, antireflection film, optical component, optical system, and imaging device
  • Infrared transmissive film, optical film, antireflection film, optical component, optical system, and imaging device

Examples

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Effect test

Embodiment 1

[0076] In Example 1, zinc oxide films containing bismuth oxide as an additive were formed on both surfaces of the substrate by magnetron sputtering. Hereinafter, the steps of film formation will be specifically described.

[0077] First, a target as a film-forming raw material is placed in a magnetron sputtering apparatus facing a substrate. A sintered target of zinc oxide was used as a raw material for film formation. At this time, bismuth oxide tablet pieces were uniformly arranged on the target. As a base material, chalcogenide glass (IRG206 manufactured by Hubei Xinhuaguang Information Materials Co., Ltd.) was used.

[0078]Next, the entire interior of the device is evacuated. Subsequently, the pressure inside the device reaches 3 x 10 -4 At Pa, 20 SCCM of argon gas (standard ml / min, 1 atmosphere (25° C.)) was injected, and then 5 SCCM of oxygen gas was injected. The exhaust rate was adjusted so that the pressure in the device at this time became 0.3 Pa.

[0079] Sub...

Embodiment 2

[0081] In Example 2, a zinc oxide film containing bismuth oxide as an additive was produced in the same manner as in Example 1 except that the content of bismuth oxide was adjusted to 0.7% by mass.

Embodiment 3

[0083] In Example 3, a zinc oxide film containing bismuth oxide as an additive was produced in the same manner as in Example 1 except that the content of bismuth oxide was adjusted to 14.7% by mass.

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Abstract

The invention provides an infrared transmission film arranged in an optical component used in a far infrared wavelength area, and the infrared transmission film is a novel infrared transmission film easy to manufacture and having high water resistance. The invention also provides an optical film, an antireflection film, an optical component, an optical system and an image pickup device which have the abovementioned infrared transmission film. The infrared transmission film is characterized in that zinc oxide is used as a principal component, and metallic oxide whose attenuation coefficient is below 0.4 in a whole wavelength area of 8[mu]m to 14[mu]m is contained as an additive.

Description

technical field [0001] The present invention relates to an infrared transmissive film, an optical film, an antireflection film, an optical component, an optical system, and an imaging device, and in particular, to an infrared transmissive film, an optical film, an antireflection film, an optical component, an optical systems and cameras. Background technique [0002] Currently, optical systems using infrared rays are used in various applications such as surveillance imaging devices, vehicle-mounted imaging devices, and heat distribution analysis. As these optical systems, a mid-infrared optical system using light in the mid-infrared wavelength range (2.5 μm to 4 μm) and a far-infrared optical system using light in the far-infrared wavelength range (8 μm to 14 μm) are generally known. For example, far-infrared optical systems are mainly used in monitoring imaging devices, vehicle-mounted imaging devices, and the like. Optical components such as infrared transmission lenses ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G02B1/10G02B1/11
CPCG02B1/10G02B1/11
Inventor 国定照房橋本涼澁谷穣
Owner TAMRON
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