Infrared transmissive film, optical film, antireflection film, optical component, optical system, and imaging device
An infrared transmission and optical system technology, which is applied in the fields of infrared transmission film, optical film, anti-reflection film, optical components, optical system and camera device, can solve the problems of film making, difficult operation and unmanufacturability, and achieve high water resistance Good performance and easy film formation
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Embodiment 1
[0076] In Example 1, zinc oxide films containing bismuth oxide as an additive were formed on both surfaces of the substrate by magnetron sputtering. Hereinafter, the steps of film formation will be specifically described.
[0077] First, a target as a film-forming raw material is placed in a magnetron sputtering apparatus facing a substrate. A sintered target of zinc oxide was used as a raw material for film formation. At this time, bismuth oxide tablet pieces were uniformly arranged on the target. As a base material, chalcogenide glass (IRG206 manufactured by Hubei Xinhuaguang Information Materials Co., Ltd.) was used.
[0078]Next, the entire interior of the device is evacuated. Subsequently, the pressure inside the device reaches 3 x 10 -4 At Pa, 20 SCCM of argon gas (standard ml / min, 1 atmosphere (25° C.)) was injected, and then 5 SCCM of oxygen gas was injected. The exhaust rate was adjusted so that the pressure in the device at this time became 0.3 Pa.
[0079] Sub...
Embodiment 2
[0081] In Example 2, a zinc oxide film containing bismuth oxide as an additive was produced in the same manner as in Example 1 except that the content of bismuth oxide was adjusted to 0.7% by mass.
Embodiment 3
[0083] In Example 3, a zinc oxide film containing bismuth oxide as an additive was produced in the same manner as in Example 1 except that the content of bismuth oxide was adjusted to 14.7% by mass.
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