A porous array electromagnetic field-enhanced SERS device for trace microcystin detection, preparation method and detection method
A microcystin and porous array technology, which is applied in the fields of instruments, measuring devices, scientific instruments, etc., can solve the problems of complicated detection of microcystins, expensive sample pretreatment, and difficulty in in-situ monitoring of water bodies. Trace Molecular Content and Its Effect on Surface Enhanced Raman Scattering Signal Detection and Weak Raman Scattering Signal Enhancement
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[0029] The preferred embodiments of the present invention will be described in detail below with reference to the accompanying drawings.
[0030] 1. Preparation of porous array electromagnetic field-enhanced SERS devices:
[0031] like figure 1 Shown: The preparation of the porous array electromagnetic field-enhanced SERS device is as follows:
[0032] 1) A silicon nitride film 1 is grown on the upper surface of the silicon dioxide substrate 2, and a window is etched on the silicon dioxide substrate by wet etching, so that the film layer is suspended on the window, and the silicon dioxide The thickness of the substrate layer is 600 nanometers, and the thickness of the film is 1 nanometer;
[0033] 2) Coating a gold film 3 with a thickness of 300 nm on the window surface and the surface of the suspended film by metal sputtering;
[0034] 3) Using the focused ion beam method, the upper and lower layers of the array arrangement are respectively prepared on the suspended thin ...
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