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A photoelectric mixing hemt and its control method

A control method and frequency mixing technology, applied in circuits, electrical components, and final product manufacturing, etc., can solve problems such as limiting the maximum operating frequency of devices, and achieve the effects of shortening moving distance, eliminating Coulomb attraction, and improving frequency characteristics.

Active Publication Date: 2019-01-29
SOUTHEAST UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

In conventional photoelectric mixing HEMTs, both photogenerated electrons and holes participate in conduction. Since the mobility of holes is much smaller than that of electrons, and there is Coulomb attraction between electrons and holes, the maximum operating frequency of the device is also limited. , the current operating frequency of photoelectric mixing HEMT is much less than 1THz

Method used

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  • A photoelectric mixing hemt and its control method
  • A photoelectric mixing hemt and its control method
  • A photoelectric mixing hemt and its control method

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0021] Such as figure 1 As shown, Embodiment 1 provides a photoelectric mixing HEMT, which includes a substrate 1, a buffer layer 2 is grown on the substrate, and a quantum well active layer is grown on the buffer layer. The quantum well active layer includes, from top to bottom, a first barrier layer 8, a first isolation layer 7, a first channel layer 6, a light absorption layer 12, a second channel layer 5, and a second isolation layer 4. , The second barrier layer 3 . The first barrier layer 8 and the second barrier layer 3 are delta doped. The bandgap width of the first channel layer 6 and the second channel layer 5 is greater than the bandgap width of the light absorbing layer 12; the first channel layer 6 and the second channel layer 5 are both depletion type or enhanced type. The upper surface of the quantum well active layer is provided with a source 10 , a drain 11 and a gate 9 , the gate 9 is located between the source 10 and the drain 11 , and the source 10 and t...

Embodiment 2

[0027] Such as figure 2 As shown, Embodiment 2 provides a photoelectric mixing HEMT, which includes a substrate 1, a buffer layer 2 is grown on the substrate, and a quantum well active layer is grown on the buffer layer. The quantum well active layer includes, from top to bottom, a first barrier layer 8, a first isolation layer 7, a first channel layer 6, a light absorption layer 12, a second channel layer 5, and a second isolation layer 4. , The second barrier layer 3 . The first barrier layer 8 and the second barrier layer 3 are delta doped. The bandgap width of the first channel layer 6 and the second channel layer 5 is greater than the bandgap width of the light absorbing layer 12; the first channel layer 6 and the second channel layer 5 are depletion-type or uniform is enhanced. Wherein, both sides of the buffer layer and the quantum well active layer form a mesa structure by etching, and the buffer layer and the quantum well active layer are located in the middle of ...

Embodiment 3

[0030] Such as image 3 As shown, Embodiment 3 provides a photoelectric mixing HEMT, which includes a substrate 1, a buffer layer 2 is grown on the substrate, and a quantum well active layer is grown on the buffer layer. The quantum well active layer includes, from top to bottom, a first barrier layer 8, a first isolation layer 7, a first channel layer 6, a light absorption layer 12, a second channel layer 5, and a second isolation layer 4. , The second barrier layer 3 . The first barrier layer 8 and the second barrier layer 3 are delta doped. The first channel layer 6 and the second channel layer 5 are both depletion type or enhancement type. The active layer of the quantum well shows that a source 10 , a drain 11 and a gate 9 are provided, the gate 9 is located between the source 10 and the drain 11 , and the source 10 and the drain 11 are located on both sides of the gate 9 . The source 10 and the drain 11 are in ohmic contact.

[0031]The forbidden band width of the fi...

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Abstract

The invention discloses a photoelectric mixing HEMT, which comprises a lowermost substrate, wherein a buffer layer is grown on the substrate, and a quantum well active layer is grown on the buffer layer; the quantum well active layer sequentially comprises a first barrier layer, a first isolating layer, a first channel layer, a light absorption layer, a second channel layer, a second isolating layer and a second barrier layer from top to bottom; and a source, a drain and a gate are arranged on the outer surface of the quantum well active layer, the gate is arranged in the middle of the source and the drain, and the source and the drain are in ohmic contact. The photoelectric mixing HEMT and a control method thereof effectively shortens the movement distance of holes, eliminates the influence of Coulomb attraction between the photo-induced electrons and the holes, and eliminates the defect of the low hole mobility, thereby being capable of significantly improving the frequency features of the photoelectric mixing HEMT.

Description

technical field [0001] The invention belongs to the technical field of semiconductors, and in particular relates to a photoelectric frequency mixing HEMT and a control method thereof. Background technique [0002] HEMT (High Electron Mobility Transistor) is a heterojunction field effect transistor that can work in ultra-high frequency (millimeter wave) and ultra-high-speed fields. The photoelectric mixing HEMT can be used in the base station in the communication system. The optical local oscillator signal transmitted by the optical fiber enters the photoelectric mixing HEMT, and performs photoelectric mixing with the electrical signal loaded on the HEMT gate, and then realizes up-conversion or down-conversion. The intermediate frequency electrical signal is up-converted to millimeter wave or THz wave for wireless transmission, and the millimeter wave can also be down-converted to intermediate frequency. In conventional photoelectric mixing HEMTs, both photogenerated electro...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L31/0352H01L31/113H01L31/18
CPCH01L31/03529H01L31/1136H01L31/1844Y02P70/50
Inventor 杨春贾少鹏宋振杰
Owner SOUTHEAST UNIV