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A planar evaporation source and evaporation device

An evaporation source, flat technology, applied in vacuum evaporation coating, sputtering coating, ion implantation coating and other directions, can solve the problems affecting the resolution of the evaporation film, the size limit of light-emitting sub-pixels, unfavorable display products, etc. Achieve uniform thickness, improve yield and improve resolution

Active Publication Date: 2019-04-09
BOE TECH GRP CO LTD +1
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  • Abstract
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  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The shadow distance seriously affects the resolution of the evaporated film, resulting in a certain limit on the size of the luminescent sub-pixel; in addition, the shadow distance may cause color mixing, light leakage and other phenomena, which seriously affects product quality and is not conducive to the production of display products with higher PPI.

Method used

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  • A planar evaporation source and evaporation device
  • A planar evaporation source and evaporation device
  • A planar evaporation source and evaporation device

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Embodiment Construction

[0022] The technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative work shall fall within the protection scope of the present invention.

[0023] Such as figure 2 , image 3 As shown, a planar evaporation source 3 includes a base 31, a heating module 34, and an even heat flat layer 35, wherein:

[0024] The heating module 34 is fixedly arranged on the base 31;

[0025] The soaking flat layer 35 is disposed on the heating module 34, and the side of the soaking flat layer 35 facing away from the heating module 34 forms an organic material film bearing surface for carrying the o...

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Abstract

The invention relates to the technical field of display, and particularly discloses a planar evaporation source and an evaporation plating device. The planar evaporation source comprises a base, a heating module and a soaking flat layer, wherein the heating module is fixedly arranged on the base; the soaking flat layer is arranged on the heating module; an organic material thin film bearing surface used for bearing an organic material thin film is formed in the surface, back on to the heating module, of the soaking flat layer; the soaking flat layer is used for enabling the organic material thin film to be heated uniformly during the heating process of the heating module, so that organic material steam with the evaporation direction being perpendicular to the organic material thin film bearing surface is formed; heat is transferred to the soaking flat layer for soaking; a better temperature uniformity in the overall plane is achieved; that the planar evaporation source can enable the organic material thin film above to evaporate uniformly and vertically is ensured; besides, as the organic material thin film bearing surface is parallel to a glass substrate to be evaporation plated, an evaporation plating thin film with a uniform thickness is formed on the glass substrate, the shadow distance for evaporation plating is reduced, and the resolution is improved.

Description

Technical field [0001] The present invention relates to the field of display technology, in particular to a planar evaporation source and an evaporation device. Background technique [0002] With the advancement of display technology, the screens of electronic display products are becoming more and more high-resolution development, especially VR (virtual reality) equipment, AR (augmented reality) equipment, for high PPI (pixels per inch) display screens The demand is particularly strong, and OLED (Organic Light Emitting Diode) display technology is considered to be the next-generation display technology due to its self-luminescence, wide viewing angle, almost infinitely high contrast, low power consumption, and extremely high response speed. The high PPI OLED display device has a good market prospect. [0003] At present, for OLED display devices, organic light-emitting materials are formed on glass substrates by vacuum evaporation. For full-color OLED display devices (RGB OLED), ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C14/24C23C14/04C23C14/12
CPCC23C14/042C23C14/12C23C14/24
Inventor 姚固王玉曾苏伟
Owner BOE TECH GRP CO LTD
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