A target structure of film forming equipment
A technology of film forming equipment and target material, applied in the field of target material structure, can solve the problem of inability to obtain a performance film layer on the surface of the substrate, and achieve the effect of uniform thickness and improved performance
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[0023] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.
[0024] The object of the present invention is to provide a target material structure of a film-forming equipment to solve the above-mentioned problems in the prior art, so that a film with uniform thickness can be obtained on the surface of the substrate.
[0025] In order to make the above objects, features and advantages of the present invention more comprehensible, the present invention will be further described in detail below in conjunction with the accomp...
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