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An internal heating integrated evaporation boat with alumina porous structure buffer layer

A porous structure, evaporation boat technology, applied to the field of internal heat integrated evaporation boats, can solve the problems of unguaranteed service life of the evaporation source, easy corrosion, easy breakage, etc., and achieves increased oxidation problems, resistance to metal melt corrosion, pores low rate effect

Inactive Publication Date: 2019-03-12
FUZHOU UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

In practical application, the metal evaporation source will become brittle and easy to break after heating, especially when infiltrated with high-temperature molten metal (such as Ni, Al) under high vacuum and alloyed to reduce the melting point of the entire material, especially at high temperature Aluminum melt is very active in vacuum, with excellent fluidity and strong corrosiveness. It is easy to corrode a variety of metals, so the service life of this type of evaporation source cannot be guaranteed.

Method used

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  • An internal heating integrated evaporation boat with alumina porous structure buffer layer
  • An internal heating integrated evaporation boat with alumina porous structure buffer layer
  • An internal heating integrated evaporation boat with alumina porous structure buffer layer

Examples

Experimental program
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Effect test

Embodiment 1

[0032] Mix 50g of alumina submicron powder, 15ml of ethanol and 10ml of acetone, add 1g of triethanolamine as a dispersant, 0.15g of carboxymethyl cellulose as a rheological agent and pore-forming agent, and 1g of PVB as a binder, and put them in a planetary ball mill Ball mill for 2 hours and mix evenly to form a ceramic slurry with a pH value of 10. The tungsten boat soaked in 15wt% sodium hydroxide solution ( figure 2 ) into the slurry, spin-coated and dipped until the coating thickness is 200 μm and evenly covered. After natural drying, it is sintered in a high-temperature box-type furnace in an aerobic atmosphere. The sintering temperature is 25~500°C, and the heating rate is 2°C / min. , and kept at 500°C for 2 hours; then the green body was sintered in a vacuum tube furnace, the temperature was 25°C~1650°C and the temperature was raised slowly, the heating rate was 2°C / min below 1400°C, and the heating rate was 0.8 at the stage of 1400~1650°C ℃ / min, 1650 ℃ for 30 minute...

Embodiment 2

[0036] Mix 50g of alumina powder with a particle size of 35~45μm, 15ml of ethanol and 15ml of acetone, add 0.5g of triethanolamine as a dispersant, 0.15g of carboxymethyl cellulose as a rheological agent and pore-forming agent, and 1g of nitrocellulose as a binder , and evenly mixed in a planetary ball mill for 2 hours to form a ceramic slurry with a pH value of 11. The tungsten boat ( figure 2 ) into the slurry, spin-coated and dipped until the coating thickness is 100 μm and covered evenly. After natural drying, it is sintered in the aerobic atmosphere of a high-temperature box furnace. The sintering temperature is 25-500 ° C, and the heating rate is 2 ° C / min , and kept at 500°C for 2 hours; then the green body was sintered in a tube furnace in vacuum, the temperature was slowly raised from 25°C to 1650°C, the heating rate was 1°C / min below 1400°C, and the heating rate was 0.9 at the stage of 1400°C to 1650°C ℃ / min, 1650 ℃ for 60 minutes, and the cooling process is cont...

Embodiment 3

[0039] Add 110g of alumina powder with a particle size of 1.5~5μm, 60ml of ethanol and 40ml of acetone mixed solvent, add 1.5g of triethanolamine as a dispersant, 1g of carboxymethyl cellulose as a rheological agent and pore-forming agent, and 3g of nitrocellulose as a binder, Mix evenly in a planetary ball mill for 2 hours to form a ceramic slurry with a pH value of 10. The tungsten boat soaked in high-concentration silica sol solution ( figure 2 ) into the slurry, spin-coated and dipped until the coating thickness is 300 μm and covered evenly. After natural drying, it is sintered in an aerobic atmosphere in a high-temperature box furnace. The sintering temperature is 25-500 ° C, and the heating rate is 2 ° C / min , and kept at 500°C for 2 hours; then put the green body in a vacuum tube furnace for sintering, the temperature is 25°C~1650°C and the temperature is raised slowly, the heating rate is 2°C / min below 1400°C, and the heating rate is 1 at the stage of 1400~1650°C ℃...

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Abstract

The invention discloses an internal-heated integrated evaporation boat with an aluminum oxide porous structure buffering layer. Surface coatings of the evaporation boat totally comprise two layers. The inner layer is the Al2O3 buffering layer of a loose porous structure, and the outer layer is the compact low-porosity corrosion-resistantAl2O3 coating. Firstly, through a rotary-coating steeping technique, the Al2O3 buffering layer with the thickness being 0.1-0.3 mm is prepared on the surface of a matrix; and then through a plasma spraying technology, the Al2O3 corrosion-resistantlayer with the thickness being 0.5-1 mm is sprayed and prepared on the evaporation boat with the buffering layer. According to the composite technique, the evaporation boat with the Al2O3 coatings of different microstructures is prepared; in service, the buffering layer of the porous structure can achieve the stress relieving effect and can further prevent the problem of matrix oxidization caused by later spraying; and the compact low-porosity Al2O3 coating brings excellent corrosion resistance into play and can be widely applied to the technical field of vacuum evaporation metal thin films.

Description

technical field [0001] The invention belongs to the technical field of vacuum coating, and in particular relates to an internal heating type integrated evaporation boat with a buffer layer of alumina porous structure. Background technique [0002] The resistance heating evaporation source is widely used in various fields due to its simple structure, convenient installation, and low price. However, it also has a disadvantage that the range of evaporation materials is limited. As a device containing low melting point metal film materials (such as Al, Ag, Fe, Ti, Ni, etc.), it has high temperature resistance, metal melt corrosion resistance and thermal shock resistance, and conducts heat under high vacuum conditions. It is the most vulnerable core component in various vacuum thermal evaporation coating equipment, and it is also the key to affect the performance quality, production efficiency and manufacturing cost of metal thin films. The resistance heating evaporation source ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C14/26C23C28/04
CPCC23C14/243C23C14/26C23C28/04
Inventor 李强郑钦龙曾发明何柯
Owner FUZHOU UNIV
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