A portable nano-processing online measurement device and measurement method

Abstract

The invention discloses a portable nano-machining online measurement device and measurement method. The portable nano-machining online measurement device comprises an optical measuring head and an electric control module. The optical measuring head and the electric control module are fixed through an optical measuring head baseplate. The light emitted by a tunable infrared laser resonator and a voltage stabilized laser diode is connected with an optical fiber transmission module through an optical fiber. The optical fiber transmission module couples the two paths of laser and transmits the laser to an optical fiber collimator. The optical fiber collimator projects the light to the blazed grating. The zero-order diffracted light of the blazed grating is projected to a reference arm reflector and returns according to the same way, and the first-order diffracted light is projected to the surface of a measured object through a collimating lens and returns according to the same way. The two paths of light interferes and returns to the optical fiber collimator, and the optical fiber transmission module detection an interference signal. The electric control module comprises a power supply unit and a signal acquisition and processing and system closed-loop control unit. The functions that optical measuring head power supply can be realized, the interference signal is transmitted to the computer to perform data processing and the system signal deviation is transmitted to the piezoelectric ceramic power supply unit to stabilize the working point of the system can be realized.

Description

technical field [0001] The invention belongs to the field of optical measurement, and in particular relates to a portable nano-processing on-line measurement device and a measurement method. Background technique [0002] Breakthroughs in measuring instruments and methods have a significant role in promoting the progress of science and technology. With the rapid development of scientific research and industrial applications, precision ultra-precision machining with precision of micro-nano level, VLSI, and micro-electro-mechanical system technology have raised the demand for nanometer measurement and metrology. In the batch production of nanometer-precision devices, defective products are often caused by substandard surface morphology. In order to improve the yield, it is necessary to inspect and evaluate the surface during processing. The current methods and instruments used for nanometer measurement are still in the laboratory stage, which can only realize the off-site meas...

AI Technical Summary

Problems solved by technology

The confocal scanning microscope method has a complex structure and large volume, and it is inconvenient to install on-site measurement, and is easily affected by external interference; the mechanical structure, optical path, signal and data processing of the grating ruler method are relatively simple, and the requirements for the environment are not high, but the measurement Low precision; laser interferometry can achieve measurement with a simple structure. Although it is easily affected by environmental disturbances, it can improve stability through system closed-loop control. It is a method suitable for online measurement at the nanometer scale

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