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A kind of ultra-smooth plane polishing device and polishing method based on magnetorheological glue

A polishing device and magnetorheological technology, applied in the field of ultra-precision machining, can solve the problems of easy sedimentation of polishing liquid, limited polishing shearing force, polishing efficiency and polishing quality that cannot meet production needs, etc., so as to ensure polishing efficiency and polishing quality. , The effect of preventing sedimentation and enrichment and improving service life

Active Publication Date: 2019-09-10
BEIJING JIAOTONG UNIV
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] The object of the present invention is to provide a kind of polishing device and polishing method based on magnetorheological glue that can improve material removal rate and improve polishing efficiency and quality, so as to solve the problems of easy sedimentation of polishing liquid and polishing shear force in the above-mentioned background technology. Limited, polishing efficiency and polishing quality can not meet the technical problems of production needs

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  • A kind of ultra-smooth plane polishing device and polishing method based on magnetorheological glue
  • A kind of ultra-smooth plane polishing device and polishing method based on magnetorheological glue
  • A kind of ultra-smooth plane polishing device and polishing method based on magnetorheological glue

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Embodiment Construction

[0029] Embodiments of the present invention are described in detail below, examples of which are shown in the drawings, wherein the same or similar reference numerals denote the same or similar elements or modules having the same or similar functions throughout. The embodiments described below by referring to the figures are exemplary only for explaining the present invention and should not be construed as limiting the present invention.

[0030] Those skilled in the art will understand that unless otherwise stated, the singular forms "a", "an", "said" and "the" used herein may also include plural forms. It should be further understood that the word "comprising" used in the description of the present invention refers to the presence of said features, integers, steps, operations, elements and / or modules, but does not exclude the presence or addition of one or more other features, Integers, steps, operations, elements, modules, and / or groups thereof.

[0031] Those skilled in t...

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Abstract

The embodiment of the invention provides an ultra-smooth plane polishing device based on magnetorheological gel, and relates to the technical field of ultra-precision machining. The ultra-smooth plane polishing device comprises a bracket, wherein a platform is arranged at the top end of the bracket; a rotating seat is fixed on the platform; a polishing disc is arranged on the rotating seat; a polishing disc driving mechanism is connected with the rotating seat; a workpiece clamping mechanism is arranged above the polishing disc and comprises a clamping disc; a magnetic field generation mechanism is arranged below the platform and comprises a rotating disc; and a plurality of permanent magnets are uniformly arranged on the rotating disc. An ultra-smooth plane polishing method comprises the following steps: fixing a workpiece on the clamping disc of a polishing head; adding the magnetorheological gel into the polishing disc; and controlling the form of the magnetorheological gel through a dynamic magnetic field, so that the flexible polishing head can be formed and the workpiece can be polished. As the form of the magnetorheological gel is controlled through the dynamic magnetic field, the ultra-smooth plane polishing device can be simplified, the polishing efficiency can be improved, and the cost can be reduced. The ultra-smooth plane polishing device and method are very applicable to the polishing of ultra-smooth plane parts.

Description

technical field [0001] The invention relates to the technical field of ultra-precision processing, in particular to an ultra-smooth surface polishing device and method based on magnetorheological glue, which is particularly suitable for ultra-smooth surface processing of microelectronic semiconductor wafers. Background technique [0002] With the development of optics and microelectronics and related technical fields, the surface quality requirements of the required materials are getting higher and higher. At this stage, the surface polishing of ultra-precision workpieces is mainly carried out by chemical mechanical polishing and magnetorheological polishing. However, after using chemical mechanical polishing, it will be difficult to clean the surface material of the workpiece, which will easily pollute the environment and cannot meet the surface cleanliness and environmental protection requirements of super precision workpieces. [0003] Magnetorheological polishing technol...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B24B1/00
Inventor 李建勇徐金环朱朋哲曹建国聂蒙
Owner BEIJING JIAOTONG UNIV
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