Transistor acoustic sensing element and its preparation method, acoustic sensor and portable device

An acoustic sensor and acoustic sensing technology, applied in the field of sensors, can solve the problems of difficulty in meeting the requirements of sensitivity, flexibility and small size, and achieve the effects of expanding the sound sensing range, improving the sound sensing sensitivity, and improving the sensitivity.
CN107478320BActive Publication Date: 2019-11-05BOE TECH GRP CO LTD +1
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Patent Information

Authority / Receiving Office
CN ยท China
Patent Type
Patents(China)
Current Assignee / Owner
BOE TECH GRP CO LTD
Publication Date
2019-11-05

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Abstract

The invention provides a transistor acoustic sensing element, a preparation method thereof, an acoustic sensor and a portable device. The transistor acoustic sensing element includes a gate, a gate insulating layer, a first pole, an active layer and a second pole arranged on a substrate, the active layer is a three-dimensional mesh structure of nanometer thin wires, and the active layer can transmit an acoustic signal Under the action of vibration, the output current of the transistor acoustic sensing element changes accordingly. The transistor acoustic sensing element can detect the sound signal by adopting the active layer of the three-dimensional mesh structure of nano-thin wires. Since the active layer of the structure can sensitively detect the weak vibration of the sound wave, the active layer of the structure The layer can improve the sensitivity of the transistor acoustic sensing element to sense acoustic signals, thereby improving its sensing performance for sound.
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Description

technical field

[0001] The invention relates to the technical field of sensors, in particular to a transistor acoustic sensing element, a preparation method thereof, an acoustic sensor and a portable device. Background technique

[0002] In recent years, with the rapid development of artificial intelligence, wearable electronics, and the Internet of Things, sensors have received more and more attention. People's performance requirements for sensors have also changed from traditional detection of source signals to high sensitivity of devices. , multi-type, flexible, small size and other directions.

[0003] Among them, acoustic sensors are widely used in intelligent bionic robots, wearable and other fields because they can perceive the changes of sound signals. However, the basic structure, process and performance of traditional acoustic sensors are difficult to meet the sensitivity, flexibility and small size requirements of people in the field of artificial intelligence or...

Claims

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