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Planar inductor type magnetic sensor

A magnetic sensor and planar inductance technology, applied in the field of sensors, can solve the problem of not being able to be used as a low frequency, and achieve the effect of increasing the effect of self-inductance and mutual inductance

Active Publication Date: 2017-12-29
SHANGHAI JIAO TONG UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

These planar coils can only detect dynamic, especially high-frequency magnetic fields, and cannot be used as low-frequency, especially static magnetic field sensors

Method used

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  • Planar inductor type magnetic sensor

Examples

Experimental program
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Effect test

Embodiment 1

[0034] Using silicon dioxide as a substrate, a rectangular planar coil is made on it by sputtering or electroplating, and a layer of silicon dioxide film is coated on one arm of the rectangular coil, and then sputtering or electroplating is applied on the silicon dioxide film. The method makes a layer of FeNi alloy thin film layer such as Figure 1-2 as shown, Figure 1-2 They are a top view and a cross-sectional view of a planar inductive magnetic sensor of Embodiment 1, respectively.

Embodiment 2

[0036] Using silicon dioxide as the substrate, a rectangular planar coil is made on it by sputtering or electroplating, and a layer of silicon dioxide film is coated on the two parallel arms of the rectangular coil, respectively. A layer of FeNi alloy film layer is made by sputtering or electroplating in the coil wire area. The alloy film layer covering the two arms of the coil is not connected, and the minimum distance is greater than the thickness of the film layer, such as Figure 3-4 as shown, Figure 3-4 They are a top view and a cross-sectional view of a planar inductive magnetic sensor according to Embodiment 2, respectively.

Embodiment 3

[0038]Using silicon dioxide as a substrate, a FeNi alloy thin film layer is made on it by sputtering or electroplating. The alloy thin film layer can be one region or multiple disconnected regions, and the minimum distance between regions is greater than that of the film. layer thickness, make a silicon dioxide film layer on the alloy film layer, make a rectangular planar coil on a substrate with an alloy film layer and a silicon dioxide insulating layer, and place an arm of the rectangular coil on an area of ​​the alloy film layer to ensure The current direction of the coil wires in this area is the same, and the silicon dioxide film layer is covered above the coil part with the alloy layer, and then the FeNi alloy film layer is made by sputtering or electroplating, and the alloy layer covered on the pad and the liner The alloy layer at the corresponding position on the upper part is connected, such as Figure 5 as shown, Figure 5 It is a cross-sectional view of a planar in...

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Abstract

The invention discloses a planar inductor type magnetic sensor. The planar inductor type magnetic sensor comprises an insulating non-magnetic conduction substrate, planar coils, magnetic conduction material layers and insulating layers; the planar coils are manufactured on the substrate; the surfaces of the planar coils, which are required to covered with the magnetic conduction material layers, are covered with the insulating layers at first, and then are covered with the magnetic conduction material layers; and the magnetic conduction material layers covering the planar coils are divided into a plurality of regions, the current directions of portions of the coils which are covered by each region are identical, and the magnetic conduction material layers which cover the conductors of the coils which have different current directions do not contact with each other, and gaps between the magnetic conduction material layers is larger than the thickness of the magnetic conduction material layers. According to the planar inductor type magnetic sensor, current directions in partial cushions of the magnetic conduction material layers / portions of the magnetic conduction material layers which cover the planar coils, are identical, so that the current of the coils will not be offset by each other in magnetic fields generated by the magnetic conduction material layers, and therefore, the self-inductance and mutual inductance effect of the magnetic conduction material layers exerted on the covered portions of the coils can be enhanced, and the influence of the magnetic conduction material layers on the overall inductance quantity of the coils is enhanced, and the action of the magnetic conductivity of the magnetic conduction material layers by the magnetic fields can be sensitively reflected in the change of the inductance quantity of the coils. The two coils are adopted, so that electric control magnetic bias can be generated for the sensor.

Description

technical field [0001] The invention relates to a sensor technology, in particular to a planar inductive magnetic sensor, which is suitable for micromachining planar technology. Background technique [0002] Magnetic sensors are one of the most widely used sensors, and can directly or indirectly measure many physical, chemical, biological and other parameters through magnetic field measurement. According to the requirements of parameters such as measurement range, resolution, and frequency range, sensors with various sensitive principles such as atomic magnetometers, quantum superconducting magnetometers, Hall elements, and coils can be selected. Magnetic sensors such as Hall and magnetoresistance can adopt micro-nano-level micro-machining technology to realize integration and batch processing, which greatly reduces the cost of sensitive devices and can fully ensure the consistency of performance parameters of batch components. However, the magnetic field resolution of the ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01R33/02G01R33/00G01R33/038
CPCG01R33/0005G01R33/02G01R33/038
Inventor 文玉梅李平卞雷祥
Owner SHANGHAI JIAO TONG UNIV
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