Suspension wire variable stiffness micro-nano probe

Abstract

The invention relates to a suspension wire variable stiffness micro-nano probe which comprises a probe, a measuring rod, an intermediate connector, a capacitor upper plate, a capacitor lower plate, annular memory alloy, a piezoelectric ceramic chip, a fixation base, a suspension wire, a dynamic platform, a capacitor digital converter and an industrial personal computer. The intermediate connectoris fixed at the center of the dynamic platform through the suspension wire. The annular memory alloy is fixed on the dynamic platform through a screw. One end of the suspension wire is connected withthe intermediate connector, and the other end is connected with the annular memory alloy. The fixation base is fixedly welded on the dynamic platform. The piezoelectric ceramic chip is fixed between the annular memory alloy and the fixation base. The measuring rod is arranged at the center of the intermediate connector. According to the invention, the piezoelectric effect of the piezoelectric ceramic chip generates lateral pressure on the annular memory alloy to deform the annular structure, so as to change the degree of tension of the suspension wire; and the rigidity and the sensitivity of asuspension mechanism are further changed, so as to satisfy the measurement requirement of a workpiece under different working conditions.

Description

technical field [0001] The invention relates to the field of micro-nano measurement, in particular to a suspension-type variable-rigidity micro-nano measuring head. Background technique [0002] In recent years, with the rapid development of micro-nano processing technology, various micro-nano-level devices have emerged. In order to ensure the processing quality of micro-nano devices, the research on corresponding detection techniques and means becomes crucial. [0003] The probe is one of the core components of the coordinate measuring machine, and its accuracy determines the overall measurement accuracy of the coordinate measuring machine. The probe is divided into two types: contact type and non-contact type: the contact type probe can be used to measure workpieces with complex features such as slopes and arcs that cannot be measured by non-contact type probes. Compared with non-contact probes, contact probes have the advantages of high precision and reliability, and ea...

AI Technical Summary

Problems solved by technology

At present, the suspension mechanism of the contact micro-nano coordinate measuring machine is mostly an elastic beam with constant stiffness, which has the following defects: when the stiffness is high, the sensitivity of the probe is low, and a large measurement force will be generated when it contacts with the workpiece, which will damage the workpiece. The surface of the workpiece; when the stiffness is low, the sensitivity of the probe increases and the required measurement force is small, but the attraction force between the probe and the workpiece will damage the repeatability of the probe system, and its inertial force will easily cause false triggering

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