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Method for Forming Gradient Thin Films by Spray Pyrolysis

A thin film and concentration gradient technology, which is applied to devices, coatings, semiconductor devices, etc. that apply liquid to the surface, and can solve problems such as high temperature resistance.

Active Publication Date: 2019-07-30
CHINA TRIUMPH INT ENG +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

Specifically, cost-effective soda-lime glass cannot be used as a substrate because it is not resistant to high temperatures

Method used

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  • Method for Forming Gradient Thin Films by Spray Pyrolysis
  • Method for Forming Gradient Thin Films by Spray Pyrolysis
  • Method for Forming Gradient Thin Films by Spray Pyrolysis

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Embodiment Construction

[0042] The method of the invention is explained by way of example with respect to the following figures. The details shown and described are only for better understanding and in no way limit the scope of protection of the claims.

[0043] Embodiments of the method of the present invention include steps S21 to S23, such as Figure 2A shown. In step S21, a base substrate is provided. For example, the base substrate is a transparent conductive layer (21) arranged on a transparent substrate (1). In this exemplary embodiment, the base substrate is commercially available SnO 2 :F. However, it is also considered that, instead of FTO, CTO can also be deposited by spray pyrolysis with variations in the concentration of elements during coating based on a procedure similar to that described for ZTO. The base substrate was heated to a temperature of 480 °C to achieve pyrolysis of the precursor compounds. In step S22, by mixing at least two precursor compounds, such as Zn(CH 3 COO) ...

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Abstract

A method for forming a gradient film using spray pyrolysis technology includes providing a base substrate, preparing a spray aqueous solution by mixing at least two precursor compounds containing at least two different elements, and spraying the spray aqueous solution onto the base substrate. The concentration ratio of at least two different elements in the sprayed aqueous solution is varied while carrying out the method. In this way, thin films can be formed that have elemental composition gradients across their layer thicknesses.

Description

technical field [0001] The object of the present invention is a method for forming gradient films by spray pyrolysis. This method is preferably used to form transparent bilayer films as front contacts in CdTe solar cells. Background technique [0002] In the prior art, CdTe solar cells have the following structure in which the layers are arranged in the mentioned order: transparent substrate (for example made of glass); transparent conductive oxide layer (TCO) formed as front contact layer; cadmium sulfide (CdS) layer; cadmium telluride (CdTe) layer; and a charge carrier collecting metal layer. In the production of solar cells in so-called cladding configurations, the transparent substrate forms the base on which the subsequent layers are successively deposited. In the production process of so-called substrate-configured solar cells, the steps of forming the individual layers are basically performed in reverse order. That is, the process starts with the formation of a bac...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L31/073B05D5/12
CPCY02E10/543H01L31/022466H01L31/073H01L31/1836H01L31/1884C23C22/76H01L21/02255H01L31/022425H01L31/0296
Inventor 维拉潘·克里希纳库马尔哈尔·迈克尔
Owner CHINA TRIUMPH INT ENG