Ionization method, preparation method and product of electrochromic device

Abstract

The invention discloses an electrochromic device ionization method. An electrochromic device comprises an anode electrochromic layer. The method for carrying out ionization on the anode electrochromiclayer comprises the following steps that a rotary target magnetron sputtering method is used for directly depositing an ion layer on the static anode electrochromic layer; in the deposition process,a target material on the outside part of a rotary target is kept to rotate at a constant speed, and a magnetic rod inside the rotary target is used for carrying out reciprocating constant-speed swingopposite the anode electrochromic layer; and the deposition process is controlled by detecting the transmittance of the anode electrochromic layer in the deposition process. The electrochromic deviceionization method has the beneficial effects that during preparing of the electrochromic device, the lithium target is uniformly deposited through a dynamic and static mixed coating mode, the deposition amount of the ion source with the key effect on the color change device can be controlled conveniently by detecting the color change reaction of the anode color change layer on line, so that preparation of the electrochromic device is simple and effective and the industrialization of electrochromic glass is facilitated.

Description

technical field [0001] The invention belongs to the technical field of electrochromic device preparation, and in particular relates to an ionization method, a preparation method and a product of an electrochromic device. Background technique [0002] Electrochromism refers to the reversible oxidation or reduction reaction of the material under the action of the polarity and intensity changes of the applied electric field, resulting in a reversible and stable change in its color. The electrochromic glass prepared by using this property can intelligently adjust the light and heat of sunlight passing through the glass, and reduce the energy consumption (cooling or heating and lighting, etc.) required by buildings to improve indoor comfort. Advanced building energy-saving glass has a huge application market in today's emphasis on green and ecological development. [0003] A typical electrochromic glass consists of a bottom conductive layer, an electrochromic layer, an ion condu...

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Problems solved by technology

It is very different from other functional film layers. The difference in thickness of lithium (or lithium oxide) deposition by 1nm will lead to huge differences in device appearance and performance, which cannot be controlled by simple online film thickness detection equipment

[0005] A commonly used method uses 100% working gas to burn the target, sputters to remove the surface oxide layer, and finally magnetron sputters stable metal lithium. The whole process requires about 60KW·H, which is time-consuming, consumes materials, and is easy to cause cavity body secondary pollution

During the actual device preparation, it was found that there is no difference in the discoloration effect of the device prepared by the ion source in the oxidation state and the ion source in the metal state. A common method uses working gas and reaction gas at the same time to sputter out the oxide on the surface of the target and let the target The material is slightly poisoned and oxidized to maintain the dynamic balance of the oxidation degree of the target surface and ensure the consistency of the deposition rate. However, in actual production, it is found that the dynamic equilibrium point is not easy to find. Lithium is extremely sensitive to the reaction gas. Target poisoning intensifies, oxidation state-metal state dynamic balance is broken

Depositing too little ion source leads to a small range of electrochromic modulation, which affects and significantly increases the resistance of the top transparent conductive layer in severe cases, and cannot achieve the color changing effect

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