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Arc ion coating equipment

A technology of arc ion and coating equipment, which is applied in the direction of ion implantation plating, sputtering plating, vacuum evaporation plating, etc., and can solve the problems that are not suitable for large-area, flat workpieces, small space, and increased production costs. To achieve the effect of improved product quality consistency, small impact, and less impurity gas

Active Publication Date: 2019-06-21
GUANGDONG SHENGBOER PHOTOELECTRIC TECH CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, the current box-type machine mainly has the following problems: the product applicability is not good, the vacuum chamber of the box-type arc ion coating equipment is cylindrical, and many functional components are installed in it, and its product loading area is annular, and the space is relatively small , It is suitable for the coating production of small workpieces, not suitable for large-area and flat workpieces, such as the coating production of stainless steel plates
In order to achieve large production capacity, the number of equipment can only be increased under the premise of solidification of the process, and the corresponding equipment cost, equipment footprint, equipment energy consumption, staffing, material delivery, etc. will lead to a substantial increase in production costs

Method used

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Embodiment Construction

[0044] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of them. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without creative efforts fall within the protection scope of the present invention.

[0045] It should be noted that all directional indications (such as up, down, left, right, front, back...) in the embodiments of the present invention are only used to explain the relationship between the components in a certain posture (as shown in the accompanying drawings). Relative positional relationship, movement conditions, etc., if the specific posture changes, the directional indication will also change accordingly.

[0046] In addition, the ...

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Abstract

The invention discloses an arc ion plating device, which is used for plating a work piece placed in a work piece frame; the arc ion plating device comprises a loading section, an unloading section, avacuum chamber body, an ion bombardment system, an arc ion plating system, and a driving system; the vacuum chamber body is arranged between the loading section and the unloading section, and comprises a first vacuum transition section, a processing section, and a second vacuum transition section which are linked in series orderly; the processing section comprises a front section and a back section which are connected to each other; the ion bombardment system is arranged at the front section, and the arc ion plating system is arranged at the back section; the driving system conveys the work piece frame so that the work piece is conveyed from the loading section to the first vacuum transition section, the front section, the back section, and the second vacuum transition section of the vacuum chamber body orderly to process and then conveyed to the unloading section. The arc ion plating device has the advantages of improving the product applicability, film quality and production efficiency of the arc ion plating device.

Description

technical field [0001] The invention relates to the technical field of arc ion coating, in particular to an arc ion coating equipment. Background technique [0002] At present, the existing arc ion coating equipment is box-type, which is mainly used for coating hard films on the surface of tools and molds, and coating decorative films on the surface of decorative materials. However, the current box-type machine mainly has the following problems: the product applicability is not good, the vacuum chamber of the box-type arc ion coating equipment is cylindrical, and many functional components are installed in it, and its product loading area is annular, and the space is relatively small , It is suitable for the coating production of small workpieces, not suitable for large-area and flat workpieces, such as the coating production of stainless steel plates. The quality of the film layer is poor, and the quality of the film layer involves two aspects. One is the consistency of pr...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C14/32
CPCC23C14/325
Inventor 高文波
Owner GUANGDONG SHENGBOER PHOTOELECTRIC TECH CO LTD
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