Vacuum inflating equipment and realizing method

Abstract

The invention discloses vacuum inflating equipment and a realizing method. The vacuum inflating equipment comprises a sealing cover, a temperature-control tooling, a worktable, a temperature controller, a clean instrument, an inflating device and a molecular pump; an air pumping port, an air pumping and deflating port and a sealing socket are mounted on the worktable; the temperature-control tooling is mounted in a closed space formed by the sealing cover and the worktable; the air pumping and deflating port outward introduces an air pumping and deflating total pipeline which communicates withthe molecular pump and the inflating device; the air pumping and deflating total pipeline is further provided with a thin film gauge and an ionization gauge; the air pumping port outward introduces acleanliness measuring pipeline which is further connected with the clean instrument; and the temperature controller is connected with a temperature control circuit of the temperature-control toolingthrough the sealing socket. According to the vacuum inflating equipment, guarantee of purity, cleanliness, temperature and pressure of gas inflated into a sealing cavity of a precision instrument is achieved, the production quality and the efficiency of products are improved, and the service lives of the products are prolonged.

Description

technical field [0001] The invention relates to airtight container inflation technology, in particular to a vacuum inflation device and a realization method. Background technique [0002] In the field of precision instruments and meters, some components or components need to be sealed in an air-filled container to work normally. The gas filled mainly has the following functions: (1) Provide a clean working environment and ensure the reliability of precision components. and durability, to prevent excess contamination from affecting the stability of components; (2) Filling the inflatable container with a specific gas facilitates the leak detection of the inflatable container after the sealing is completed. For example, after filling helium, the mass spectrometer (3) Fill high-purity clean inert gas to prevent oxidation or volatilization of materials in the internal components of the inflatable container, prevent qualitative change of materials or pollution of the operating env...

AI Technical Summary

Problems solved by technology

This method lacks quantitative control over the inflation process, which is mainly manifested in the following aspects: (1) The temperature of the inflation and sealing environment changes with the temperature of the working environment, so it is impossible to accurately control the temperature of the gas inflated, and there is air leakage caused by changes in the ambient temperature during the sealing process. The risk of inhaling the inflatable container; (2) the lack of cleanliness testing of the inflated gas makes it difficult to ensure the cleanliness of the inflated gas; (3) the lack of effective control of the gas pressure during the inflation process poses a safety risk; (4) only mechanical The pump is vacuumed, the vacuum degree is low, and it needs to be pumped and pumped repeatedly, and the inflation time is long, which affects the purity and production efficiency of the gas charged.

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