High-reliability temperature sensor

Abstract

The invention discloses a high-reliability temperature sensor. The sensor comprises a platinum resistor strip, a silicon change-over plate and a single-crystal silicon carrier; the platinum resistor strip is of a folded-line-shaped structure; two ends of the platinum resistor strip are respectively connected with a first lead and a second lead; the first lead and the second lead are both disposedon the upper side surface of the silicon change-over plate; the tail end of the first lead and the tail end of the second lead are respectively connected with a first lead terminal and a second lead terminal; through holes are formed in the silicon change-over plate; first protrusions are arranged inside the through holes; the first protrusions are connected with connecting blocks; the connectingblocks are connected with the outer side of the single-crystal silicon carrier; and the platinum resistor strip is fixedly arranged at the upper side of the single-crystal silicon carrier. According to the high-reliability temperature sensor of the invention, the platinum resistor strip, the silicon change-over plate with the through holes and the single-crystal silicon carrier are adopted; the platinum resistor strip can be supported by the single-crystal silicon carrier in a suspended manner; thermal conduction between the platinum resistor strip and the substrate thereof, and devices on thesubstrate can be decreased; cross-interference can be decreased; the thermal insulation of a supporting structure can be optimized; and measurement accuracy can be improved.

Description

technical field [0001] The invention relates to a temperature sensor, in particular to a high-reliability temperature sensor. Background technique [0002] With the development of modern high-tech technology, more stringent requirements are put forward for the reliability, response time and environmental applicability of the temperature sensor, which requires the temperature control accuracy and structural design control of the sensor, especially the accuracy of the temperature. The control puts forward higher requirements. The thermal resistance temperature measurement is based on the characteristic that the resistance value of the technical conductor changes with the change of temperature to measure the temperature. Therefore, it is only necessary to measure the resistance value change of the temperature sensing resistance The corresponding temperature value is currently used for temperature detection in various fields. Temperature sensors such as thermistors, platinum res...

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Problems solved by technology

[0002] With the development of modern high-tech technology, more stringent requirements are put forward for the reliability, response time and environmental applicability of the temperature sensor, which requires the temperature control accuracy and structural design control of the sensor, especially the accuracy of the temperature. The control puts forward higher requirements. The thermal resistance temperature measurement is based on the characteristic that the resistance value of the technical conductor changes with the change of temperature to measure the temperature. Therefore, it is only necessary to measure the resistance value change of the temperature sensing resistance The corresponding temperature value is currently used for temperature detection in various fields. Temperature sensors such as thermistors, platinum resistors or bimetals are mainly used. The temperature measurement effect is not good and it is easy to cause damage. Because platinum and its alloys have high resistance temperature Coefficient, high temperature resistance, corrosion resistance, large temperature range and high material strength, which are widely used in temperature measurement devices. For the temperature measurement sensor integrated in the control device, the thermal sensor is affected by its substrate and lining The influence of heat conduction and thermal interference of other devices on the bottom significantly affects the accuracy of temperature measurement. Therefore, a temperature sensor is designed to sense the temperature quickly and accurately.

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