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Preparing method for titanium-aluminum alloy target material

A titanium-aluminum alloy and target technology, applied in metal material coating process, ion implantation coating, coating and other directions, can solve problems such as poor effect and complex process, achieve high density, simple preparation process, sputtering good shot effect

Inactive Publication Date: 2018-03-20
陕西爱骨医疗股份有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] The purpose of the present invention is to provide a method for preparing a titanium-aluminum alloy target, which solves the problems of poor effect and complicated process in the preparation of the existing titanium-aluminum alloy target

Method used

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preparation example Construction

[0016] A method for preparing a titanium-aluminum alloy target provided by the present invention comprises the following steps:

[0017] Step 1, weigh titanium powder and aluminum powder respectively according to the mass ratio of 3-4:1, and then uniformly mix them, wherein the titanium powder is 0-grade sponge titanium, and the particle diameters of titanium powder and aluminum powder are both 50-100um ;

[0018] Step 2, utilizing an isostatic press to press it into a compact;

[0019] Step 3, using a vacuum hot-press sintering furnace to pressurize and sinter the billet to obtain a billet, wherein the pressurized pressure is 50-80 MPa, and the sintering temperature is 1500°C-1650°C;

[0020] Step 4, annealing the billet, the annealing temperature is 400°C-600°C, and the holding time is 2h-4h, to obtain the titanium-aluminum alloy target.

[0021] Preferably, after annealing the ingot in step 4, ultrasonic cleaning is also performed.

[0022] The present invention will be ...

Embodiment 1

[0024] A method for preparing a titanium-aluminum alloy target provided in this embodiment includes the following steps:

[0025] Step 1, weigh titanium powder and aluminum powder respectively according to the mass ratio of 3:1, and then mix them evenly, wherein, the titanium powder is 0-grade sponge titanium, and the particle diameters of titanium powder and aluminum powder are both 50um;

[0026] Step 2, utilizing an isostatic press to press it into a compact;

[0027] Step 3, using a vacuum hot-press sintering furnace to pressurize and sinter the billet to obtain a billet, wherein the pressurized pressure is 80MPa, and the sintering temperature is 1500°C;

[0028] Step 4: Annealing the billet, the annealing temperature is 400° C., the holding time is 2 hours, after the annealing treatment is completed, it is ultrasonically cleaned to obtain the titanium-aluminum alloy target.

Embodiment 2

[0030] A method for preparing a titanium-aluminum alloy target provided in this embodiment includes the following steps:

[0031] Step 1, weigh titanium powder and aluminum powder respectively according to the mass ratio of 3.5:1, then evenly mix, wherein, titanium powder is 0 grade sponge titanium, and the particle diameter of titanium powder and aluminum powder is 70um;

[0032] Step 2, utilizing an isostatic press to press it into a compact;

[0033] Step 3, using a vacuum hot-press sintering furnace to pressurize and sinter the billet to obtain a billet, wherein the pressurized pressure is 50MPa, and the sintering temperature is 1600°C;

[0034] Step 4: annealing the billet, the annealing temperature is 500° C., the holding time is 3 hours, and ultrasonic cleaning is performed after the annealing treatment to obtain the titanium-aluminum alloy target.

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Abstract

The invention discloses a preparing method for a titanium-aluminum alloy target material. The preparing method includes the following steps that after titanium powder and aluminum powder are evenly mixed, an isostatic press is used for pressing the mixed powder into a briquette; the briquette is subjected to pressurizing sintering in the vacuum environment, and a prefabricated billet is obtained;and the billet is subjected to annealing treatment, and the titanium-aluminum alloy target material is obtained. By means of the preparing method for the titanium-aluminum alloy target material, the problems that existing titanium-aluminum alloy target material preparing is poor in effect and complex in technology are solved; according to the titanium-aluminum alloy target material, the titanium powder and the aluminum powder which are small in particle size and high in purity are selected firstly to be mixed for isostatic pressing treatment, the briquette high in compactness is obtained, andafter the briquette is subjected to vacuum pressurizing sintering and ultrasonic cleaning, the titanium-aluminum alloy target material is obtained through preparing; and the preparing technology is simple, and the prepared titanium-aluminum alloy target material is high in compactness and good in sputtering effect.

Description

technical field [0001] The invention belongs to the technical field of target material preparation, and in particular relates to a method for preparing a titanium-aluminum alloy target material. Background technique [0002] With the development of the electronics industry and target sputtering process, more and more materials need to be coated to get better results, and titanium-aluminum alloy has become a material for many materials due to its high strength and wear resistance. However, the existing titanium-aluminum alloy target preparation process has the problems of low target density and complicated preparation process. Contents of the invention [0003] The purpose of the present invention is to provide a method for preparing a titanium-aluminum alloy target, which solves the problems of poor effect and complicated process in the preparation of the existing titanium-aluminum alloy target. [0004] The technical solution adopted in the present invention is: a method...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/34C22C1/04C22C14/00C22F1/18
CPCC22C1/0458C22C14/00C22F1/183C23C14/3414
Inventor 王炜
Owner 陕西爱骨医疗股份有限公司
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