Evaporation method of linear evaporation sources and evaporation equipment

Abstract

The invention discloses an evaporation method of linear evaporation sources and evaporation equipment. An evaporation part comprising at least one linear evaporation source is controlled to conduct scanning in the direction parallel to short edges of all frames, and meanwhile, the at least one linear evaporation source is controlled to conduct evaporation on internal evaporation materials; and base plates to be subject to evaporation are fixed to the frames, and the length of the linear evaporation sources is larger than or equal to the length of long edges of the base plates to be subject toevaporation. According to the evaporation method of the linear evaporation sources in the embodiment, the evaporation part is controlled to conduct scanning in the direction parallel to the short edges of all frames, the scanning path of the evaporation part is shortened, and therefore the scanning time of the evaporation part can be shortened, the mechanical loss of the evaporation equipment is reduced, and the using efficiency of the evaporation material is improved.

Description

technical field [0001] The invention relates to the technical field of manufacturing display devices, in particular to an evaporation method and evaporation equipment for a linear evaporation source. Background technique [0002] Organic Light-Emitting Diode (OLED) is a device that uses an organic thin film layer that forms a p-n junction to combine the holes (Hole) injected into the anode and the electrons (Electron) in the cathode to emit light. Lightweight, good flexibility, wide viewing angle, low power consumption and other advantages, it is a new generation of display technology with great development prospects. When making an OLED device, a transparent ITO (Indium Tin Oxide) electrode layer that acts as an anode, multiple organic layers with different transport capabilities, and a metal electrode layer that acts as a cathode are sequentially formed on a glass substrate. Among them, the organic layer includes: hole injection layer (HIL), hole transport layer (HTL), li...

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Problems solved by technology

[0004] The embodiment of the present invention provides a linear evaporation source evaporation method and evaporation equipment, which are used to solve the problems in the prior art, such as the low utilization rate of evaporation materials caused by the long scanning distance of the evaporation source and the problems of the evaporation system. The problem of mechanical aging

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