Flexible electronic pressure sensor and preparation method thereof

A pressure sensor, flexible technology, applied in the direction of sensors, respiratory organs, medical science, etc., can solve the problems of low sensitivity and limited detection ability of flexible tactile sensors, and achieve strong pressure sensitivity, good sensing performance, and outstanding elasticity Effect

Active Publication Date: 2018-04-13
深圳远芯光路科技有限公司
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  • Abstract
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  • Application Information

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Problems solved by technology

[0005] In order to solve the above-mentioned problems in the prior art, the present invention provides a flexible electronic pressure sensor and its preparation method to solve the problems of low sensitivity and limited detection capability of the existing flexible tactile sensor

Method used

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  • Flexible electronic pressure sensor and preparation method thereof
  • Flexible electronic pressure sensor and preparation method thereof

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preparation example Construction

[0037] figure 2 The method flowchart of an example provided for the preparation method of the flexible electronic pressure sensor of the present invention, as figure 2 Shown, the preparation method of flexible electronic pressure sensor comprises the following steps:

[0038] Step S1, preparing polyaniline hollow nanospheres 31;

[0039] Step S2, mixing and dispersing polyaniline hollow nanospheres 31 and multi-walled carbon nanotubes 32 in a preset mass ratio into a dimethylformamide solution to obtain a first mixture, drying and removing the first mixture in step S2 The dimethylformamide in obtains the second mixture, spin coats the second mixture to form the composite pressure sensing membrane 3;

[0040] Step S3, sandwiching the composite pressure sensing film 3 between the two electrodes 2 to assemble a pressure sensing unit;

[0041] Step S4, manufacturing a flexible and stretchable substrate 1 with micro-patterns;

[0042]In step S5, a plurality of pressure sensin...

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Abstract

The invention discloses a flexible electronic pressure sensor and a preparation method thereof. The flexible electronic pressure sensor comprises multiple pressure sensing units; each pressure sensingunit is composed of two substrates, two electrodes oppositely arranged between the two substrates and a compound pressure sensing membrane arranged between the two electrodes; the surface of each substrate is provided with a lotus-shaped micro pattern subjected to micro pattern treatment, and the substrates have flexible and retractable characteristics; the compound pressure sensing membrane is composed of multiple polyaniline hollow nanometer balls and multi-wall carbon nanometer pipes used for connecting adjacent polyaniline hollow nanometer balls; each pressure sensing unit utilizes a plasma treatment machine and adopts an electrode pixel treatment mode to form sensor arrays with set areas; the compound pressure sensing membrane has excellent elasticity capability and the ultra-low elasticity modulus, can achieve effective amplification and conversion of various kinds of exterior stimulation and is great in pressure sensing performance and high in temperature resolution; additionally, each pressure sensing unit can easily integrate the sensor arrays.

Description

technical field [0001] The invention relates to the technical field of skin tactile sensors, in particular to a flexible electronic pressure sensor and a preparation method thereof. Background technique [0002] Touch is an important sensory function when people are in direct contact with the external environment. Flexible tactile sensors are the key technology to realize electronic skin technology. Its purpose is to simulate human perception ability and has excellent development prospects. [0003] At present, with the development of microelectronics technology and the emergence of various organic materials, a variety of flexible tactile sensor development schemes have been proposed, but most of them belong to the laboratory stage, and few have reached commercialization. Moreover, although the materials used in some flexible tactile sensors that have reached productization can withstand high stress, their sensitivity is low and their detection capabilities are limited, so t...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): A61B5/08
CPCA61B5/08A61B5/6802
Inventor 朱玲房菲儿张静王威
Owner 深圳远芯光路科技有限公司
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