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Interferometric method based on spectrum analysis of fringe image

A spectrum analysis and fringe image technology, applied in the field of interferometry based on fringe image spectrum analysis, can solve problems such as unclear physical meaning, adverse effects of phase value calculation work, etc. Simple process effect

Active Publication Date: 2018-04-17
NANJING UNIV OF SCI & TECH
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Problems solved by technology

At the same time, some scholars have also studied the accurate estimation method of carrier frequency of fringe images (Su Yin, Fan Qi, Wang Yunfei. High-accuracy Fourier transform analysis of interference fringes), but the carrier frequency estimation based on the position of side lobe centroid The method has the deficiency of unclear physical meaning, which will have a negative impact on the final phase value calculation work

Method used

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  • Interferometric method based on spectrum analysis of fringe image
  • Interferometric method based on spectrum analysis of fringe image
  • Interferometric method based on spectrum analysis of fringe image

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Embodiment 1

[0086] In this example, a 25.4 mm caliber Fizeau interferometer independently developed by Nanjing Interfero Opto-electronics Tenhnology Co., Ltd was used to build a test optical path, and an interferometric experiment was carried out on a set of optical flat mirrors. The interferometer uses a semiconductor laser with a wavelength of 635nm as a light source, and is equipped with a high-precision fringe image analysis device. The interferometer in kind figure 1 shown. The specific measurement steps are as follows:

[0087] Step 1, the interference fringe image is collected, the interference fringe image collected in this embodiment is as follows Figure 4 shown.

[0088] Step 2. Perform extension preprocessing on the interference fringe grayscale image to obtain the interference fringe extension image. The specific steps are:

[0089] Step 2.1, perform a two-dimensional Fourier transform process on the collected interference fringe image, and the obtained spectrum is as fol...

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Abstract

The invention discloses an interferometric method based on spectrum analysis of a fringe image. A single carrier frequency loaded interference fringe image, generated by an interferometer, of a to-be-measured component is obtained; prolongation and edge smoothing are carried out on the fringe image, and FFT (fast Fourier transform) is carried out on the prolonged fringe image to obtain a frequencyspectrum of the image. Aimed at the frequency spectrum, a 2D interpolation FFT algorithm is used to estimate a position of a spectral sidelobe peak value, and the image carrier frequency is removed according to an estimation result. Phase information of a wave surface to be measured is obtained by calculated, and the surface shape of the to-be-measured component is estimated. According to the method of the invention, the fringe image is analyzed and processed on the basis of improved fringe image prolongation and fringe carrier wave estimation methods, and the interferometric precision is higher.

Description

technical field [0001] The invention belongs to the field of optical measurement, and in particular relates to an interference measurement method based on frequency spectrum analysis of fringe images. Background technique [0002] High-precision planar optical components are widely used in the field of optical engineering. In order to realize the surface shape detection, three-dimensional shape acquisition and optical uniformity test of these components, high-precision interferometer equipment based on the principle of light interference and the corresponding interference fringe measurement method are usually used. Processing interference fringe images based on Fourier transform is a commonly used interferometry method at present. It can obtain relevant information of optical components to be tested from a single interference fringe image, which reduces the complexity of the interference system and can effectively overcome the external The interference caused by vibration i...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01B11/24
CPCG01B11/2441
Inventor 赵兆阚凌志
Owner NANJING UNIV OF SCI & TECH
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