Fluidized bed synthesizing device for tungsten hexafluoride

Abstract

The invention discloses a fluidized bed synthesizing device for tungsten hexafluoride and belongs to the technical field of preparation devices for tungsten hexafluoride. The fluidized bed synthesizing device comprises a fluidized bed reactor, a material feeding pipe, a material conveying pipe, a gas inlet pipe, a nitrogen purging gas tank, a quantitative hopper, a heater, a condenser, a collecting tank, an air compressor, a buffer tank and a fluorine-containing mixing gas tank, wherein a feeding opening, a gas inlet and an exhaust outlet are formed in the fluidized bed reactor; the feeding opening is connected with the quantitative hopper by the material feeding pipe; the exhaust outlet is connected with the condenser by the material conveying pipe; the gas inlet is connected with the fluorine-containing mixing gas tank by the gas inlet pipe; the nitrogen purging gas tank is communicated with the quantitative hopper by a pipeline; a liquid outlet of the condenser is communicated withthe collecting tank through the pipeline; an outlet in the tail end of the condenser is sequentially connected with the air compressor and the buffer tank through the pipeline; and the buffer tank iscommunicated with the gas inlet pipe through the pipeline. The fluidized bed synthesizing device disclosed by the invention has the advantages that frequent addition of the material is not needed; a metal tungsten powder is in a fluidized state; the preparation efficiency is high and the collection is simple; and no tungsten powder is entrained.

Description

technical field [0001] The invention relates to a fluidized bed synthesis device for tungsten hexafluoride, belonging to the technical field of tungsten hexafluoride preparation devices. Background technique [0002] Tungsten hexafluoride has a very wide range of applications in the field of semiconductors. Metal tungsten is deposited in semiconductor circuits. WSi2 produced by metal tungsten vapor deposition (CVD) technology can largely avoid radioactive impurities α particles in the Soft errors in memory circuits. [0003] The current synthesis method of tungsten hexafluoride is mainly synthesized on a fixed bed. This preparation method has the following disadvantages. (1) During the synthesis process, it is necessary to continuously stop and add tungsten powder. When the shutdown is restarted, the entire system needs to be replaced and cleaned, which is time-consuming and laborious. , and the synthesis efficiency is low. (2) When collecting tungsten hexafluoride, the gas...

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Problems solved by technology

[0004] The technical problem to be solved by the present invention is to provide a fluidized bed synthesis device for tungsten hexafluoride, which solves the need for frequent shutdown of the current tungsten hexafluoride synthesis device, low efficiency, and the collection of gas and liquid at the same time is not conducive to further separation Screening Questions

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