Three-dimensional fine metal structure additive manufacturing method and manufacturing device

Abstract

The invention discloses a manufacturing method of a three-dimensional minute metal structural additive. The manufacturing method at least comprises the following steps that a substrate is subjected tolaser radiation and electrolytic deposition treatment at the same time, and a three-dimensional minute metal structure is manufactured on the substrate in an additive mode; and at least one zone on the surface of the substrate contains a shielding layer. The method has the advantages that the precision of minute structure electrolytic deposition can be improved; the temperature of a part of electroforming liquid in an action zone is increased through a laser photothermal effect, and improvement of the efficiency of minute metal structure electrochemical deposition is facilitated; when the laser energy is large, the laser energy enables the deposited metal to be molten, fusion and coagulation of a metal material are achieved, and improvement of the compactness and the mechanical performance of the electrolytic deposited minute structure is facilitated.

Description

technical field [0001] The present application relates to a method for manufacturing a three-dimensional fine metal structure additive and a manufacturing device thereof, belonging to the field of additive manufacturing. Background technique [0002] Micro Electro Mechanical System (MEMS) is one of the fastest-growing technical research fields since the 1990s, which has had a huge impact on aviation, aerospace, automobile, bioengineering, information, network and medical systems, etc. It has promoted the rapid development of various industries and caused qualitative changes and leaps in many industrial products. Three-dimensional metal microstructures are widely used in MEMS and are the basis and core of MEMS, such as inertial measurement components, inkjet print head nozzles, microfluidic channels, etc. [0003] Electrodeposition is an advanced technology for manufacturing fine metal structures based on the principle of electrochemical cathodic deposition. It has the advan...

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Problems solved by technology

Li Yong from Tsinghua University et al. used ultrashort pulse power supply for fine electrochemical deposition (Y.Li, Y.Zheng, G.Yang, L.Peng, Localized electrochemical micromachining with gap control. Sensors & Actuators A Physical, 1008, 144-148 (2003 ).), but this method needs to precisely control the distance between the electrode and the substrate to several microns, which is difficult to control

[0004] At present, the main problems of electrodeposited three-dimensional fine metal structures are relatively loose structure, large porosity, and insufficient mechanical properties.

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