A method for producing a silicon stack
A production method and technology of silicon stacks, applied in semiconductor devices, electrical components, circuits, etc., can solve the problems of low yield rate and waste of energy, and achieve the effects of high yield rate, energy saving, and short process
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[0043] The technical content of the present invention is described below through specific specific embodiments, and those skilled in the art can easily understand other advantages and effects of the present invention from the content disclosed in this specification. The present invention can also be implemented or applied through other different specific embodiments. The details in this specification can also be based on different viewpoints and applications, and various modifications and changes can be made without departing from the spirit of the present invention.
[0044] The invention discloses a production method of a silicon stack, which includes the following innovative steps:
[0045] A production method of a silicon stack includes the following steps:
[0046] Step 1: Two-step square die cutting
[0047] 1.1. Pre-cut in the thickness direction of the silicon wafer to form incompletely cut square crystal grains. The cutting depth of the silicon wafer is 3 / 5 to 4 / 5 of the tota...
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