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A method for producing a silicon stack

A production method and technology of silicon stacks, applied in semiconductor devices, electrical components, circuits, etc., can solve the problems of low yield rate and waste of energy, and achieve the effects of high yield rate, energy saving, and short process

Inactive Publication Date: 2019-06-07
SHANDONG UNIV OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

The highest welding temperature in this patent is 385°C. If the welding temperature is too high, it will easily lead to a high proportion of welding pores < 20%, a low yield rate (less than 90%), and a waste of energy.

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  • A method for producing a silicon stack
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Embodiment Construction

[0043] The technical content of the present invention is described below through specific specific embodiments, and those skilled in the art can easily understand other advantages and effects of the present invention from the content disclosed in this specification. The present invention can also be implemented or applied through other different specific embodiments. The details in this specification can also be based on different viewpoints and applications, and various modifications and changes can be made without departing from the spirit of the present invention.

[0044] The invention discloses a production method of a silicon stack, which includes the following innovative steps:

[0045] A production method of a silicon stack includes the following steps:

[0046] Step 1: Two-step square die cutting

[0047] 1.1. Pre-cut in the thickness direction of the silicon wafer to form incompletely cut square crystal grains. The cutting depth of the silicon wafer is 3 / 5 to 4 / 5 of the tota...

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Abstract

The invention discloses a production method of silicon stacks. The method comprises the steps that square crystal grains are cut by adopting a two-step method and pre-cutting in the thicken directionof silicon chips to form square crystal grains which are not completely cut, wherein the cutting depth of the silicon chips accounts for (3 / 5)-(4 / 5) of the total thickness of the silicon chips; N surfaces of the silicon chips which are pre-cut in the thickness direction are upward placed on crystal grain cracking paper, cutting cuts are placed upward and pressed slightly, so that the square crystal grains which are not completely cut are completely cracking. Then the crystal grains are placed into a suction cup for grain shaking, according to a strict dimension scale relation which is kept bythe size of soldering flakes and the size of the square crystal grains, filling is conducted according to a sequence of alternative filling of the soldering flakes and the crystal grains, scaling powder is evenly sprayed on the surfaces of welding boats, and the welding boats are subjected to low-temperature welding. According to the production method of the silicon stacks, alignment of the crystal grains in advance is not needed before welding, automatic alignment of the crystal grains after welding can be achieved, the production links are simplified, the welding temperature is lowered, theenergy is saved, the yield is high, the area of air holes is low, and the problem of sparse and loose welding is solved.

Description

Technical field [0001] The invention relates to a production process of a diode, in particular to a production method of a silicon stack. Background technique [0002] At present, silicon stack welding, square grain welding, alignment and welding alignment are difficult problems. The current general method is to use the process of welding and stacking the whole silicon wafer and then cutting it. The welding fixture is bulky and complicated, and because the whole silicon wafer is in the previous Due to the deformation caused by the diffusion process, the large solder pieces are unevenly distributed after being melted at high temperature, resulting in a high rate of damage during the cutting process. The small cells after the cut have to be refilled to solder the leads. The secondary soldering causes secondary damage to the grains and the number of soldering times. The more the damage, the more serious. The above process is not only complicated in process, complicated in equipment...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L21/50H01L21/60
CPCH01L21/50H01L24/71
Inventor 刘云燕李广德李书涛孙美玲王硕付圣贵尹广超魏功祥
Owner SHANDONG UNIV OF TECH
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