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Measurement assembly for measuring deposition rate and method therefore

A technology for measuring components and deposition rates, applied to measuring devices, electrical components, piezoelectric/electrostrictive/magnetostrictive devices, etc., can solve problems such as insufficient stability and insufficient accuracy

Inactive Publication Date: 2018-05-11
APPLIED MATERIALS INC
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, these measurement systems suffer from insufficient accuracy and / or insufficient stability over the required time period

Method used

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  • Measurement assembly for measuring deposition rate and method therefore
  • Measurement assembly for measuring deposition rate and method therefore
  • Measurement assembly for measuring deposition rate and method therefore

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Embodiment Construction

[0023] Reference will now be made in detail to various embodiments of the present disclosure, one or more examples of which are illustrated in the drawings. In the following description of the figures of the drawings, the same reference numerals denote the same components. Hereinafter, only the differences of the respective embodiments are described. Each example is provided by way of explanation of the disclosure and not intended to limit the disclosure. Furthermore, features illustrated or described as part of one embodiment can be used on or in combination with other embodiments to yield yet a further embodiment. It is intended that the description cover such modifications and variations.

[0024] In the present disclosure, the expression "an oscillating crystal for measuring a deposition rate" can be understood as an oscillating crystal for measuring a mass change of a deposited material on a unit area of ​​an oscillating crystal by measuring a frequency change of an osc...

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Abstract

A measurement assembly (100) for measuring a deposition rate of an evaporated material is described. The measurement assembly (100) includes an oscillation crystal (110) for measuring the deposition rate, a measurement outlet (150) for providing evaporated material to the oscillation crystal (110), and a magnetic closing mechanism (160) configured for opening and closing the measurement outlet (150) by magnetic force.

Description

technical field [0001] The present disclosure relates to a measurement assembly for measuring the deposition rate of evaporated material, an evaporation source for evaporation of material, a deposition system for applying material to a substrate Apparatus and a method for measuring the deposition rate of evaporated material. The present disclosure relates in particular to a measurement assembly for measuring the deposition rate of evaporated organic material and a method therefor. Furthermore, the present disclosure particularly relates to devices including organic materials therein, such as evaporation sources and deposition devices for organic materials. Background technique [0002] Organic evaporators are tools used in the production of organic light-emitting diodes (OLEDs). OLEDs are a special type of light-emitting diode in which the light-emitting layer includes thin films of certain organic compounds. Organic Light Emitting Diodes (OLEDs) are used in the manufactu...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N29/02C23C14/54G01N29/24H01L41/113H10N30/30
CPCG01N29/022G01N29/2443G01N2291/0256C23C14/24C23C14/546G01N29/036G01N29/222
Inventor 乔斯·曼纽尔·迭格斯-坎波德烈亚斯·勒普乌韦·许斯勒斯蒂芬·班格特
Owner APPLIED MATERIALS INC