Solar cell and method for manufacturing the same
A technology for solar cells and electrodes, applied in final product manufacturing, sustainable manufacturing/processing, circuits, etc., can solve problems such as poor passivation properties, complex doping processes, and deterioration of semiconductor substrate interface properties, to enhance productivity, improve Efficiency and reliability, effect of preventing deterioration
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[0140] A first tunneling layer and a second tunneling layer formed of amorphous silicon are formed on a front surface and a rear surface of an n-type single crystal silicon substrate. A first intermediate layer formed of a silicon oxide layer having hydroxyl groups is formed on the first tunneling layer, and a second intermediate layer formed of a silicon oxide layer having hydroxyl groups is formed on the second tunneling layer. A first conductive region formed of a molybdenum oxide layer and a second conductive region formed of a titanium oxide layer are formed. The first intermediate layer and the second intermediate layer were formed through an atomic layer deposition process and had a thickness of 0.5 mm. The first conductive region is formed by an atomic layer deposition process at a process temperature of 200° C. and has a thickness of 10 nm, and the second conductive region is formed by an atomic layer deposition process at a process temperature of 200° C. and has a th...
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