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Optical imaging system magnification and distortion high-precision measuring device and measuring method

An optical imaging system and measurement device technology, applied in the field of optical measurement, can solve the problems of using a lithography machine and its sub-systems, unable to use the optical system processing and adjustment workshop, and lack of versatility.

Active Publication Date: 2018-06-01
SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

Although these two technologies can achieve high-precision measurement of magnification and distortion, their use depends on the lithography machine and its subsystems, and cannot be applied to optical system processing and assembly workshops, as well as other scientific research and industrial applications. sex

Method used

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  • Optical imaging system magnification and distortion high-precision measuring device and measuring method
  • Optical imaging system magnification and distortion high-precision measuring device and measuring method
  • Optical imaging system magnification and distortion high-precision measuring device and measuring method

Examples

Experimental program
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Effect test

Embodiment 1

[0086] In this embodiment, there are two point light sources, as follows:

[0087] A high-precision measurement device for magnification and distortion of an optical imaging system, comprising: two point light sources (point light source S 1 and a point light source S 2 ), area array detector 2, object space workbench 3, image space workbench 4, described optical imaging system 1 to be measured adopts microscopic objective lens element; Described area array detector 2 adopts CCD element; Described Point light source S 1 and a point light source S 2 is the output end face of the single-mode fiber, where: point light source S 1 and a point light source S 2 Located in the field of view of the object space of the optical imaging system 1 to be tested, the two outgoing lights come from the same light source and can interfere with each other; the area array detector 2 is located in the image area of ​​the optical imaging system 1 to be tested, and the area of ​​the area array de...

Embodiment 2

[0109] In this embodiment, there are three point light sources, as follows:

[0110] A high-precision measurement device for magnification and distortion of an optical imaging system, comprising: three point light sources (point light source S 1 , point light source S 2 and a point light source S 3 ), area array detector (2), object space workbench (3), image space workbench (4), described optical imaging system 1 to be tested adopts microscopic objective lens element; Described area array detector 2 adopts CCD element; said point light source S 1 , point light source S 2 and a point light source S 3 is the output end face of the single-mode fiber, where: point light source S 1 , point light source S 2 and a point light source S 3 Located in the object field of view of the optical imaging system 1 to be tested, the three outgoing lights come from the same light source and can interfere with each other; the area array detector 2 is located in the image area of ​​the opti...

Embodiment 3

[0133] In this embodiment, there are more than three point light sources. Part of the point light sources in the point light source array in two directions along the X direction and Y direction of the object space workbench (3) can choose to share or not to share. The embodiment is to select the shared mode, which is as follows:

[0134] A high-precision measurement device for magnification and distortion of an optical imaging system, comprising: an area array detector 2, an object-space workbench 3, an image-space workbench 4, and a point light source array 5. The optical imaging system 1 to be tested adopts a microscope The objective lens element; the area array detector 2 adopts a CCD element; the point light source array 5 is located in the object space area of ​​the optical imaging system 1 to be tested, and all point light source outgoing lights come from the same light source and two adjacent point light sources can interfere with each other The area array detector 2 is...

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Abstract

The invention discloses an optical imaging system magnification and distortion high-precision measuring device, which comprises at least two point light sources, an area array detector, an object-sideworkbench and an image-side workbench, wherein the two point light sources borne by the object-side workbench are located in the object-side view field of an optical imaging system to be tested. Emergent light is from the same light source and can interfere with each other; and the area array detector borne by the image-side workbench is located in the image-side area of the optical imaging system to be tested. When the device is adopted to measure the magnification and the distortion of the optical imaging system to be tested, the magnification of the X and Y directions of the object-side workbench in the center view field of the measuring imaging system serve as ideal magnification beta x O and beta y O in the two directions, the distance between two adjacent point light sources and thedistance between two image points formed after passing through the imaging system are measured to obtain the magnification distribution in X and Y directions of the full view field of the imaging system; and the magnification and the coordinate value of all the visual field points are utilized to obtain relative distortion distribution in the X direction and the Y direction of the full view field.

Description

technical field [0001] The invention belongs to the technical field of optical measurement, in particular to a high-precision measurement method for magnification and distortion of an optical imaging system. Background technique [0002] Optical imaging systems are widely used in biological detection, biomedicine, microelectronics, precision manufacturing and other fields. The distortion of the imaging system is one of the important performance indicators to evaluate the performance of the system. The high-precision detection of magnification is the prerequisite for the detection of image quality parameters such as distortion and wave aberration of the optical imaging system. For the measurement of distortion, the traditional methods are mainly precision length measurement method, precision angle measurement method and star point method. The precision length measurement method is to take pictures of the calibrated standard grid plate, then use a measuring microscope or a r...

Claims

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Application Information

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IPC IPC(8): G01M11/02
CPCG01M11/02G01M11/0257
Inventor 董冠极唐锋王向朝冯鹏彭常哲严焱
Owner SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI
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