Device and method for processing metal surface microstructures through formwork electro-hydraulic beam

Abstract

The invention provides a device and a method for processing metal surface microstructures through a formwork electro-hydraulic beam. The device comprises an electro-hydraulic beam nozzle, an insulating formwork, a workpiece, a carrying platform, electrolyte, a workpiece bin, an electrolyte jet pressure control system, a power source, an electrolyte conveying pipeline, a filtering system and a pressure pump, the power source comprises a power source anode and a power source cathode, the electro-hydraulic beam nozzle is connected with the power source cathode, the workpiece is connected with thepower source anode, and one end of the electrolyte conveying pipeline is connected with the electrolyte while the other end of the same is provided with the electro-hydraulic beam nozzle. The insulating formwork is made on the workpiece through photoetching technology and semiconductor technology, the electrolyte is ejected to the workpiece from the electro-hydraulic beam nozzle, and areas, not protected by the insulating formwork, of the workpiece are removed. The device has the advantages of zero stress and high material removal rate during electro-hydraulic beam processing and also has thecharacteristics of large batch and high accuracy of the photoetching process.

Description

technical field [0001] The invention relates to the field of electro-hydraulic beam machining, in particular to a device and method for machining metal surface microstructures with template electro-hydraulic beams. Background technique [0002] The principle of electro-liquid beam machining is to apply a high voltage between the cathode and the anode, the electrolyte is pumped into the nozzle, and when it flows through the cathode, it is charged to form a cathodic electro-liquid beam, which is shot at the anode workpiece at high speed, so that the workpiece undergoes electrochemical process. Dissolve and enable processing. The traditional electro-hydraulic beam machining method is a single-point machining method, but the number of microstructures in practical applications is huge, and the efficiency of the single-point machining method is extremely low. Moreover, the machining accuracy of the traditional electro-hydraulic beam machining method depends on the diameter of the ...

AI Technical Summary

Problems solved by technology

[0003] Aiming at the deficiencies of the prior art, the present invention provides a device and method for electro-hydraulic beam machining of metal surface microstructures with templates, which solves the disadvantages of difficult manufacture, difficult positioning, and difficult control of electrolyte jet flow stability in electro-hydraulic beam machining. , combined with high-resolution photolithography technology, can prepare large-area, high-resolution surface microstructures for metals

Images