Wide-range and high-precision rolling angle measuring device and measuring method

Abstract

The invention belongs to the field of photoelectric measurement of a rolling angle, and particularly discloses a wide-range and high-precision rolling angle measuring device. The measuring device comprises a double-frequency laser device, a light splitting prism, a phase meter and a computer, wherein the light splitting prism is arranged at the front end of the optical axis of the double-frequencylaser device, a first polarizer and a first photoelectric detector are sequentially arranged on the reflection optical axis of the light splitting prism; a quarter-wave plate and a depolarization light splitting prism are sequentially arranged on the transmission optical axis of the light splitting prism; a backward prism reflector, a half-wave plate and a four-angle cone reflector are sequentially arranged in the direction of the transmission optical axis of the depolarization light splitting prism; a plane reflecting mirror is arranged on one side of the four-angle cone reflector; a secondpolarizer and a second photoelectric detector are arranged in the reflection direction of the depolarization light splitting prism; the first photoelectric detector and the second photoelectric detector are connected with the phase meter, and the phase meter is connected with the computer. The measuring device enables the phase difference and the rolling of the half-wave plate to be in a linear relation, the rolling angle measuring range is enlarged, the size is small, and the measuring precision is high.

Description

technical field [0001] The invention belongs to the field of photoelectric measurement of roll angle, and in particular relates to a roll angle measuring device with large range and high precision. Background technique [0002] High-precision guide rails occupy an important position in the fields of CNC machine tools, three-coordinate machines and precision testing. Roll angle error is an important part of the geometric error of high-precision guide rails. Its accuracy is one of the important reference indicators for measuring the performance of precision guide rails. Its measurement technology level It is the premise and basis for the acceptance inspection and error compensation of precision guide rails to realize high-precision machining. [0003] There are generally three angle errors in the kinematic pair of mechanical guide rails, namely pitch angle error, yaw angle error and roll angle error. Among them, pitch angle and yaw angle errors can be measured by a high-preci...

AI Technical Summary

Problems solved by technology

However, the measurement range of the above method is small, and it can only measure the roll angle within a few degrees, which is difficult to meet the measurement of a wide range of roll angle errors. In addition, in the multiple reflection method, the beam passing through the half wave plate multiple times Distributed in the same direction on the half-wave plate, making the measurement device too bulky

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